New approaches for reactive sputtering of dielectric materials on large scale substrates
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OpenAlex topics: Semiconductor materials and devices · Acoustic Wave Resonator Technologies · Copper Interconnects and Reliability
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References (4)
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1. Beister · Glastech. Ber. · 1993 · 66 · 175
2. J. Szczyrbowski, G. Bräuer, M. Ruske, G. Teschner, A. Smelty, these Proceedings, p. 262.
3. B. Szyszka, F. Simon, M. Siegesmund, S. Jäger, these Proceedings, p. 74.
4. J. Szczyrbowski, G. Bräuer, G. Teschner, A. Zmelty, these Proceedings, p. 25.