journal article·2000-03

Elastic modulus, hardness and fracture toughness of SiO2-filled methyltrimethoxysilane coatings on glass substrates

J Malzbender, G de With

Journal of Non-Crystalline Solids· Volume 265· Issue 1-2
Publisher page

Abstract

Indentations using a Berkovich indenter were performed in order to analyze the mechanical properties of a SiO2-filled methyltrimethoxysilane (MTMS) coating. The coatings were deposited using a spin-coating technique. The elastic modulus and the hardness were determined on the basis of the load-displacement curve. The effects of coating thickness, composition and substrate material were investigated. Cracks, delamination and chipping were observed and used to assess the fracture toughness of the coating and the interface.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Metal and Thin Film Mechanics · Adhesion, Friction, and Surface Interactions · Copper Interconnects and Reliability

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

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