The manufacture and study of the microstructure, mechanical properties, and corrosion behavior of Fe31Cr15Mo14C10B10Si5Ti15 metallic glass thin film, prepared by the magnetic sputtering method

Fe ₃₁Cr ₁₅Mo ₁₄C ₁₀B ₁₀Si ₅Ti ₁₅ , as an iron-based TFMG, was provided on a substrate made of 304 SUS and a Si wafer by the magnetic sputtering method at a sputtering power of 147 W. The microstructure, mechanical properties like nanohardness, adhesion strength, and toughness, and corrosion behavior of the metallic glass thin films were examined. The results indicated the formation of an amorphous thin film having a thickness of 753 nm, a nanohardness of 17 GPa, and a satisfactory adhesion value HF1-HF2. Moreover, the fracture toughness of the TFMG was obtained to be equal to 6.14 MPa.m ^1/2. The decrease of corrosion current density to 3.09 × 10 ^–6 A/cm ² and the increase of its polarization resistance to 14,903 Ω.cm ² compared to the substrate showed the high corrosion resistance of the thin film.