Influence of Si atoms on the structure and electronic properties of amorphous DLC films
Source abstract
Abstract
The paper considers the effect of silicon on the formation of the structure and properties of amorphous diamond-like carbon (DLC) films. Thin films of silicon-modified amorphous diamond-like carbon (DLC:Si) were synthesized by magnetron ion-plasma co-sputtering of a combined target. Studies of the structure and properties of amorphous DLC:Si films were carried out in the range of silicon concentrations up to 6.75 at.%. A change in the formation of the film structure is shown using atomic force microscopy (AFM) and transmission electron microscopy (TEM). Raman spectroscopy (RS) and X-ray photoelectron spectroscopy (XPS) revealed a significant change in the local structure of amorphous DLC:Si films. Which, in turn, leads to a change in the density of states of π-electrons in the band and, as a rule, to a change in the electronic properties.
Source: expertdata · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Carbon Nanotubes in Composites · Metal and Thin Film Mechanics
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (52)
Show source-provided references
1. Diamond chemical vapor deposition10.1146/annurev.pc.42.100191.003235 ↗
2. An updated overview of diamond-like carbon coating in tribology10.1080/10408436.2014.940441 ↗
3. Mechanical and tribological properties of amorphous carbon films10.1023/A:1019152515982 ↗
4. Mechanical and tribological properties of amorphous carbon films deposited on implanted steel substrates10.1016/j.tsf.2003.12.073 ↗
5. Tribology of amorphous diamond films grown or modified by ion implantation10.1007/BF01165962 ↗
6. Influence of plasma parameters on the growth and properties of magnetron sputtered CNx thin films10.1063/1.373690 ↗
7. Analysis of hydrogenated amorphous carbon films deposited by middle frequency pulsed unbalanced magnetron sputtering10.1016/j.jnoncrysol.2012.12.012 ↗
8. Structure and mechanical properties of low stress tetrahedral amorphous carbon films prepared by pulsed laser deposition10.1140/epjb/e20020031 ↗
9. The characterization of amorphous carbon nitride films grown by RFCVD method10.1016/S0022-3093(01)00354-4 ↗
10. The influence of preparation conditions on the structural properties and hardness of diamond-like carbon films, prepared by plasma source ion implantation10.3390/coatings10040360 ↗
11. Comparative study of optical properties of germanium carbon films deposited by reactive sputtering and co-sputtering10.1016/j.jnoncrysol.2012.12.009 ↗
12. Local order studies of C-rich amorphous silicon–carbon thin films10.1016/S0022-3093(98)00087-8 ↗
13. Microstructure and mechanical properties of Mo/DLC nanocomposite films10.1016/j.diamond.2008.04.018 ↗
14. Microstructure and property evolution of Cr-DLC films with different Cr content deposited by a hybrid beam technique10.1016/j.vacuum.2010.11.013 ↗
15. Diamond-like amorphous carbon10.1016/S0927-796X(02)00005-0 ↗
16. Diamond-like carbon for data and beer storage10.1016/S1369-7021(06)71791-6 ↗
17. A critical review of diamond like carbon coating for wear resistance applications10.1016/j.ijrmhm.2018.09.006 ↗
18. Study on deposition of amorphous DLC-Si films by RF-PECVD10.4028/www.scientific.net/KEM.552.244 ↗
19. Deposition, morphology and functional properties of layers based on DLC:Si and DLC:N on polyurethane10.1007/s00339-020-03939-y ↗
20. Structure and tribological properties of DLC:Si/AlCrN low friction thin film10.1051/matecconf/201925208002 ↗
21. Investigation of DLC-Si film deposited inside a 304SS pipe using a novel hollow cathode plasma immersion ion processing method
22. Tribological behaviour of Si–DLC coatings10.1179/026708499101516641 ↗
23. Thermal stability and tribological performance of DLC-Si-O films10.1155/2011/483437 ↗
24. Fabrication and photoluminescence of SiC quantum dots stemming from 3C, 6H, and 4H polytypes of bulk SiC10.1063/1.4755778 ↗
25. Artificially layered heteropolytypic structures based on SiC polytypes: molecular beam epitaxy, characterization and properties10.1016/S0370-1573(02)00632-4 ↗
26. Status of silicon carbide (SiC) as a wide-bandgap semiconductor for high-temperature applications: a review10.1016/0038-1101(96)00045-7 ↗
27. Raman spectra of silicon carbide small particles and nanowires10.1088/0953-8984/17/15/010 ↗
28. Effect of defects on optical phonon Raman spectra in SiC nanorods10.1016/S0038-1098(99)00262-8 ↗
29. Identification of β-SiC surrounded by relatable surrounding diamond medium using weak Raman surface phonons10.1007/s12034-013-0573-x ↗
30. A Raman spectroscopy study of individual SiC nanowires10.1002/adfm.200600816 ↗
31. Scattering in mosaic silicon carbide films10.1134/S1063783410090106 ↗
32. The effect of nonequilibrium conditions on the structure and optical properties of amorphous carbon films10.1134/S0030400X19080228 ↗
33. Imaging and dynamics of light atoms and molecules on graphene10.1038/nature07094 ↗
34. Determination of the sp3/sp2 ratio of a-C:H by XPS and XAES10.1016/S0022-3093(99)00388-9 ↗
35. Fabrication of DLC thin films with improved diamond-like carbon character by the application of external magnetic field10.1016/j.carbon.2015.06.081 ↗
36. XPS study of Fe(II)–Fe(III) (oxy)hydroxycarbonate green rust compounds10.1002/sia.2758 ↗
37. Characterization of silicon carbide and silicon powders by XPS and zeta potential measurement10.1023/A:1006734100499 ↗
38. Characterizing graphitic carbon with X-ray photoelectron spectroscopy: a step-by-step approach10.1002/cctc.201500344 ↗
39. Role of SiOx on the photoluminescence properties of β-SiC10.1016/j.ceramint.2016.02.145 ↗
40. XPS study on the dispersion of carbon additives in silicon carbide powders10.1016/0169-4332(91)90400-E ↗
41. The surface composition of silicon carbide powders and whiskers: an XPS study10.1557/JMR.1989.0189 ↗
42. Interpretation of Raman spectra of disordered and amorphous carbon10.1103/PhysRevB.61.14095 ↗
43. Formation of Fröhlich bipolarons10.1103/PhysRevB.39.3649 ↗
44. Effect of defects on optical phonon Raman spectra in SiC nanorods10.1016/S0038-1098(99)00262-8 ↗
45. Infrared absorption in small ionic crystals10.1002/pssb.2220510107 ↗
46. Raman scattering from GaP microcrystals: analysis of the surface phonon peak10.1088/0022-3719/18/12/019 ↗
47. Some new features of the photoluminescence of SiC(6H), SiC(4H), and SiC(15R)10.1063/1.357103 ↗
48. Photoluminescence and Raman spectroscopy in hydrogenated carbon films10.1109/20.617873 ↗
49. Optical properties and electronic structure of amorphous germanium10.1002/pssb.19660150224 ↗
50. Optical bandgap of single- and multi-layered amorphous germanium ultra-thin films
51. Fabrication and photoluminescence of SiC quantum dots stemming from 3C, 6H, and 4H polytypes of bulk SiC
52. Blue-green luminescence from porous silicon carbide10.1063/1.111979 ↗