Gas barrier characteristics of a polysilazane film formed on an ITO-coated PET substrate

Abstract With the aim of developing a high-performance gas barrier material, a polysilazane film was applied to an indium tin oxide (ITO)-coated organic PET substrate (i.e., the ITO and polysilazane films were formed sequentially on the PET substrate), and its properties were evaluated. The resulting material exhibits favorable gas barrier characteristics (oxygen permeability 0.02 cc/m 2 day, water vapor permeability 0.15 g/m 2 day) and performs well as a gas barrier. By controlling the atmosphere during heat treatment when forming the polysilazane film, it is possible to form a highly transparent film with good gas barrier performance. Since this material also conducts electricity due to the presence of the ITO film, it can be used to implement various advanced functions.