Formation of nanoparticles in soda-lime glasses by single and double ion implantation

Abstract Structural characteristics and optical properties of monometallic and bimetallic Ag and Au nanoparticles in the surface region of soda-lime glass fabricated by ion implantation have been studied by transmission electron microscopy and optical spectroscopy. As a result it has been found that both, implantation dose and process temperature, strongly influence the metal nanoparticle formation governed by ion diffusion and metal precipitation as well as the involved stress generation around the particles. Thus, the mean size of metal nanoparticles and the width of the particle containing region beneath the glass surface increase with increasing temperature as well as implanted dose. Upon sequential high-dose double implantation to form bimetallic Ag–Au nanoparticles a rather complex configuration has been obtained. Particles of sizes above a threshold of 5–10 nm exhibit distinct image contrast features indicating the development of central voids whose sizes are proportional to the outer particle diameter.