The effect of hydrogen dilution on the aminosilane plasma regime used to deposit nitrogen-rich amorphous silicon nitride
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OpenAlex topics: Semiconductor materials and devices · Advanced ceramic materials synthesis · Metal and Thin Film Mechanics
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References (9)
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8. Matsuda · 1989
9. Beyer · J. Non-Cryst. Solids · 1987 · 97&98 · 102710.1016/0022-3093(87)90247-X ↗