Nanocrystalline silicon formation in a SiH4 plasma cell
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
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References (7)
Show source-provided references
1. Oda · 1995 · 358 · 721
2. Otobe · 1995 · 377 · 51
3. Watanabe · Plasma Sources Sci. Technol. · 1994 · 3 · 28610.1088/0963-0252/3/3/008 ↗
4. Kono · Jpn. J. Appl. Phys. · 1993 · 32 · L54310.1143/JJAP.32.L543 ↗
5. Volmer · Z. Phys. Chem. · 1926 · 119 · 27710.1515/zpch-1926-11927 ↗
6. Nielsen · 1964
7. M. Otobe, unpublished.