Size controlled nc-Si synthesis by SiO/SiO2 superlattices

Abstract The synthesis of nc-Si by reactive evaporation of SiO and subsequent thermal induced phase separation is reported. The size control of nc-Si is realized by evaporation of SiO/SiO2 superlattices. By this method a separate control of crystal size and density is possible. A strong blueshift of the photoluminescence signal from 850 to 750 nm with decreasing crystal size without significant intensity degradation is observed. Temperature dependent investigations of the photoluminescence are included.