Micro-electromechanical Systems for Nano-science

Micro-electromechanical systems are ideal tools for nano-science because they bridge the gap between the nano- and the macro-world. Moreover, several of these instruments can be operated in parallel to either increase the throughput or to provide redundancy. The majority of the components of such a system have dimensions above the nanometer scale. Still, some require placement and pattern accuracy well below this limit. This will be highlighted in a short review of a few examples: Scanning optical near field microscope probe fabrication, where an aperture of 50 nm in diameter was incorporated at the probing tip; parallel scanning force microscope for measuring dust particles on Mars where redundancy is essential; and a miniaturized electron column for parallel electron beam lithography, where the throughput needs to be increased.