Plasma-based processes for planar and 3D surface patterning of functional nanoparticles
Source abstract
Abstract
Abstract We present a gas-phase process for surface patterning and 3D self-assembly of nanoparticles (NPs) of functional materials such as metals, oxides, and nitrides. The method relies on electrostatic assembly of free-flying NPs with unipolar charge produced in plasma sources. We demonstrate the capability of the process in self-assembly of NPs, with the size in the range 10–60 nm, into arrays of free-standing 3D microstructures with complex morphologies. Considering that the plasma nanoparticle sources are compatible with synthesis of a large library of material NPs, the process introduces a novel approach for 3D printing of various functional NPs, high-precision device integration of NPs on sub-micrometer scales, and large-area parallel surface patterning of NPs.
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Research context
OpenAlex topics: Nanomaterials and Printing Technologies · nanoparticles nucleation surface interactions · Electrohydrodynamics and Fluid Dynamics
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References (31)
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