The Effect of Substrate Temperature on the Properties of Nanostructured Silicon Carbide Films Deposited by Hypersonic Plasma Particle Deposition
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Advanced ceramic materials synthesis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (22)
Show source-provided references
1. Askeland, D.R., 1989. The Science and Engineering of Materials, PWS-KENT Publishing Co., Boston, p. 500.
2. Barsoum, M., 1997. Fundamentals of Ceramics, McGraw Hill.
3. Bianchi, L., P.Lucchese, A. Denoirjean, P. Fauchais & S.Kuroda, 1995. Evolution of quenching stress during ceramic thermal spraying with respect to plasma parameters, Proc. 8th National Thermal Plasma Spray Conference, 11–15 September1995, Houston, Texas.
4. Bieberich, M.T. & S.L. Girshick, 1996. Control of substrate temperature during diamond deposition, Plasma Chem. Plasma Proc. 16, 157S-168S.10.1007/BF01512633 ↗
5. Delplancke, M.P., J.M. Powers, G.J. Vandentop, M. Salmeron & G.A. Somorjai, 1991. Preperation and characterization of amorphous SiC:H thin films. J. Vac. Sci. Technol. A9, 450–455.10.1116/1.577431 ↗
6. El Khakani, M.A., M. Chaker, A. Jean, S. Boily, & J.C. Keiffer, 1994. Hardness and Young's modulus of amorphous a-SiC thin films determined by nanoindentation and bulge tests. J. Mater. Res. 9(1), 96–103.10.1557/JMR.1994.0096 ↗
7. Huber, P., H. Kress & H. Kaiser,Vacuum plasma spraying in combination with hot isostatic pressing for the repair of fabrication of superalloy components, In Proc. 12th Nat. Thermal Spray Conf. (Orlando, FL), Sept. 13–17, 1987, pp.155–167.
8. Karthikeyan, J., C.C. Berndt, J. Tikkanen, S. Reddy & H. Herman, 1997. Plasma spray synthesis of nanomaterial powders and deposits. Mat. Sci. Eng. A238, 275–286.10.1016/S0921-5093(96)10568-2 ↗
9. Knudsen, F.P., 1962. Effect of Porosity on Young's Modulus of Alumina. J. Am. Ceram. Soc. 45, 94.10.1111/j.1151-2916.1962.tb11089.x ↗
10. Kong, P.C. & E. Pfender, 1987. Formation of Ultrafine _-Silicon Carbide Powders in an Argon Thermal Plasma Jet. Langmuir3, 259–265.10.1021/la00074a020 ↗
11. Leonidova, G.G., 1980. New metastable high-pressure phase of doped n-type silicon. Sov. Phys. Solid State 22(3), 559–560.
12. Mayo, M.J., 1996. Processing of nanocrystalline ceramics from ultrafine particles. Int. Mater. Rev. 41(3), 85–115.10.1179/imr.1996.41.3.85 ↗
13. Metals Handbook, 10th Ed., Vol. 2., ASME International 1990.
14. Moody, N.R., R.Q. Hwang, Venkataraman, J.E. Angelo, D.P. Norwood, & G.W. Gerberich, 1998. Adhesion and fracture of tantalum nitride films. Acta Mater. 46(2), 585–597.10.1016/S1359-6454(97)00243-7 ↗
15. Oliver, W.C. & G.M. Pharr, 1992. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation. J. Mater. Res. 7, 1564.10.1557/JMR.1992.1564 ↗
16. Rao, N.P., N. Tymiak, J. Blum, A. Neuman, H.J. Lee, S.L. Girshick, P.H. McMurry & J. Heberlein, 1998. Hypersonic Plasma Particle Deposition of Nanostructured Silicon and Silicon Carbide. J. Aerosol Sci. 29, 707–720.10.1016/S0021-8502(97)10015-5 ↗
17. Rao, N.P., H.J. Lee, M. Kelkar, D.J. Hansen, J.V.R. Heberlein, P.H. McMurry & S.L. Girshick, 1997a. Nanostructured materials production by hypersonic plasma particle deposition. Nanostructured Materials 9, 129–132.10.1016/S0965-9773(97)00035-4 ↗
18. Rao, N.P., A. Neuman, J. Blum, N. Tymiak, J. Heberlein, P.H. McMurry & S.L. Girshick, 1997b. Thermal plasma spraying of nanostructured coatings by hypersonic plasma particle deposition. Proc. 10th Natl. Thermal spray conf., Indianapolis, IN, 15–19 Sep. 1997. In: C.C. Berndt, ed., Thermal Spray: A united forum for scientific and technological advances, ASM Intl., Materials Park, OH, pp. 329–333.10.31399/asm.cp.itsc1997p0329 ↗
19. Siegel, R.W., 1993. Synthesis and properties of nanophase materials. Mater. Sci. Eng.A168. 189–197.10.1016/0921-5093(93)90726-U ↗
20. Spriggs, R.M., 1961. Expression for effect of porosity on elastic modulus of polycrystalline refractory materials. J. Am. Ceram. Soc. 44, 94.10.1111/j.1151-2916.1961.tb11671.x ↗
21. Spriggs, R.M. & L.A. Brissette, 1962. Expressions for shear modulus and Poisson's Ratio of porous refractory oxides. J. Am. Ceram. Soc. 45, 198.10.1111/j.1151-2916.1962.tb11121.x ↗
22. Spriggs, R.M., L.A. Brissette & T. Vasilos, 1962. Effect of porosity on elastic and shear moduli of polycrystalline magnesium oxide. J. Am. Ceram. Soc. 45, 400.10.1111/j.1151-2916.1962.tb11180.x ↗