Sensor and microelectronic elements based on nanoscale granular systems
Source abstract
Abstract
Specific effects observed in small metal particles due to their distinction from bulk material as well as phenomena inherent to an ensemble of these particles coupled by electron tunneling have attracted considerable attention to nanosized systems. Electron and photon emission was revealed as a power was fed into the metal nanoparticle films deposited on insulating substrates either by passage of an electrical current in the film plane or by laser irradiation in the infrared and visible range. The electrical conductivity of metal nanoparticle films close to the percolation threshold is sensitive to temperature, substrate bending and adsorption of various gases. Besides, the current–voltage characteristics of the conduction current of a system consisting of a metal nanoparticle film and an adsorbate exhibit a voltage-controlled negative resistance region. These peculiar properties enable nanosized particle systems to be used for various applications. The present review deals with a variety of sensors for physical properties and microelectronics elements based on nanoparticle films. The mechanisms underlying the special properties are discussed. Some technological methods ensuring better parameter definition and long-term stability of sensors are also described.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Surface and Thin Film Phenomena · Chemical and Physical Properties of Materials · Force Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (100+)
Show source-provided references
1. Adelt M, Nepijko SA, Drachsel W, Freund H-J (1998) Size dependent luminescence of small palladium particles. Chem Phys Lett 291:425–43210.1016/S0009-2614(98)00620-4 ↗
2. Alekseenko BV, Fedorovich RD (1979) Anomalous electrophysical phenomena in dispersed metallic films. Ukr Fiz Zhurnal 24:126–127
3. Alekseenko BV, Fedorovich RD (1982) Influence of adsorption on current-voltage characteristics of discontinuous metal films. Thin Solid Films 92:253–25810.1016/0040-6090(82)90007-4 ↗
4. Alekseenko BV, Fedorovich RD (1985) Elertrical conductivity of discontinuous gold films with N-type voltage-current characteristics within the temperature range 30–290 K. Ukr Fiz Zhurnal 30:1559–1563
5. Alekseenko BV, Fedorovich RD, Tomchuk PM (1987) The effect of adsorption on development of the VCNR in island metal film. Mater Sci 13:161–166
6. Asano Y, Oguri A, Inoue J, Maekawa S (1994) Giant magnetoresistance in magnetic granular alloys. Phys Rev B 49:12831–1283410.1103/PhysRevB.49.12831 ↗
7. Azizi A, Thompsom SM, Ounadjela K, Gregg J, Vennegues P, Dinia A, Arabski J, Fermon C (1995) Correlation between the structural and transport properties of granular CoAg systems prepared by MBE. J Magn Magn Mater 148:313–31410.1016/0304-8853(95)00250-2 ↗
8. Baibich MN, Broto JM, Fert A, Nguyen Van Dau F, Petroff F, Eitenne P, Creuzet G, Friederich A, Chazelas J (1988) Giant magnetoresistance of (001)Fe/(001)Cr magnetic superlattices. Phys Rev Lett 61:2472–247510.1103/PhysRevLett.61.2472 ↗
9. Bakonyi I, Peter L (2010) Electrodeposited multilayer films with giant magnetoresistance (GMR): progress and problems. Prog Mater Sci 55:107–24510.1016/j.pmatsci.2009.07.001 ↗
10. Belotskii ED, Tomchuk PM (1990) Electron-phonon interaction and hot electrons in small metal islands. Surf Sci 239:143–15510.1016/0039-6028(90)90626-J ↗
11. Benditskii AA, Danko DV, Fedorovich RD, Nepijko SA, Viduta LV (1994) Use of dispersed systems of fine particles as IR detectors. Int J Electron 77:985–98810.1080/00207219408926121 ↗
12. Benditskij AA, Viduta LV, Kulyupin YuA, Ostranitsa AP, Tomchuk PM, Fedorovich RD, Yakovlev VA (1986) Interaction of laser radiation with island metal films. Izv Akad Nauk USSR Ser Fiz 50:1634–1637
13. Berkowitz AE, Mitchell JR, Carey MJ, Young AP, Zhang S, Spada FE, Parker FT, Hutten A, Thomas G (1992) Giant magnetoresistance in heterogeneous Cu–Co alloys. Phys Rev Lett 68:3745–374810.1103/PhysRevLett.68.3745 ↗
14. Berndt R, Gimzewski JK, Schlitter RR (1993) Photon emission from small particles in an STM. Z Phys D 26:S87–S88 suppl. issue10.1007/BF01425626 ↗
15. Biehl S, Lüthje H, Bandorf R, Sick J-H (2006) Multifunctional thin film sensors based on amorphous diamond-like carbon for use in tribological applications. Thin Solid Films 515:1171–117510.1016/j.tsf.2006.07.143 ↗
16. Bishay AG, Fikry W, Hunter H, Ragie HF (2000) Temperature coefficient of the surface resistivity of two-dimensional island gold films. J Phys D Appl Phys 33:2218–222210.1088/0022-3727/33/18/303 ↗
17. Blessing R, Pagnia H (1982) Electron emission from gold island films. Phys Stat Solidi (b) 110:537–54210.1002/pssb.2221100221 ↗
18. Blessing R, Pagnia H, Sotnik N (1981) The electroforming process in MIM diodes. Thin Solid Films 85:119–12810.1016/0040-6090(81)90624-6 ↗
19. Borziak PG, Kulyupin YuA (1977) Investigations of discontinuous metal films in the USSR. Thin Solid Films 44:1–1910.1016/0040-6090(77)90023-2 ↗
20. Borziak PG, Kulyupin YuA (1980) Electron processes in Island metal films. Naukova Dumka, Kiev
21. Borziak PG, Sarbej OG, Fedorowitsch RD (1965) Neue Erscheinungen in sehr dünner Metallschichen. Phys Stat Solidi 8:55–5810.1002/pssb.19650080105 ↗
22. Borziak PG, Kulyupin YuA, Sarbej OG, Fedorowitsch RD (1969) Investigation of the light and electron emission centers in discontinuous gold films. Ukr Fiz Zhurnal 14:395–401
23. Borziak PG, Kolomiets VM, Kulyupin YuA, Pashitskii EA, Pilipchak KN, Tomchuk PM (1973a) Nature of light emission from discontinuous metal films. 1. Characteristics of light emission from discontinuous metal films. In: Preprint of Institute of Physics, Acad Sci Ukr SSR, No.5, Kiev
24. Borziak PG, Viduta LV, Kandyba PE, Kolesnikov DP, Kostenko AD, Kulyupin YuA, Fedorovich RD, Yastrebov VG (1973b) Cold electron emission from cathodes based on discontinuous molybdenum films. Izv Akad Nauk USSR Ser Fiz 37:2613–2616
25. Borziak PG, Kulyupin YuA, Nepijko SA, Tomchuk PM (1976) Effect of electron heating on the processes in island films. Bull Acad Sci USSR Phys Ser (USA) 40:139–145
26. Borziak PG, Kulyupin YuA, Nepijko SA, Shamonya VG (1981a) Electrical conductivity and electron emission from discontinuous metal films of homogenous structure. Thin Solid Films 76:359–37810.1016/0040-6090(81)90535-6 ↗
27. Borziak PG, Kulyupin YuA, Rudakovskaya LA, Fedorovich RD (1981b) The temperature dependence of electrical conduction in discontinuous gold films. Thin Solid Films 81:137–14310.1016/0040-6090(81)90300-X ↗
28. Borziak PG, Gorban’ SA, Grigorieva LK, Nagaev EL, Nepijko SA, Chizhik SP (1990) Mutual charging of small metallic particles. Sov Phys JETP 70:347–352
29. Borziak PG, Fedorovich RD, Kiyayev OE, Kulyupin YuA, Rudakovskaya LA (1994) A composite system of metal particles in a dielectric matrix for use as a thermoresistor. Int J Electron 77:347–34910.1080/00207219408926066 ↗
30. Broitman E, Zimmerman R (1998) Ion-plated discontinuous film strain gauges. Thin Solid Films 317:440–44210.1016/S0040-6090(97)00637-8 ↗
31. Caricato AP, Luches A, Rella R (2009) Nanoparticle thin films for gas sensors prepared by matrix assisted pulsed laser evaporation (review). Sensors 9:2682–269610.3390/s90402682 ↗
32. Carl A, Dumpich G, Hallfarth D (1989) Antilocalization and electron–electron interaction in thin granular palladium-carbon mixture films. Phys Rev B 39:3015–302010.1103/PhysRevB.39.3015 ↗
33. Carl A, Dumpich G, Wassermann EF (1994) Significance of quantum size effects in the conductivity of granular Pd x C1−x films. Phys Rev B 50:4802–480910.1103/PhysRevB.50.4802 ↗
34. Cheshko IV (2009) Physical processes in functional elements on base film systems Co/Cu(Ag, Au) with spin-depended scattering of electrons. PhD Thesis, Sumy State University, Sumy. http://essuir.sumdu.edu.ua/bitstream/123456789/633/1/чeшкo.pdf
35. Cinchetti M, Gloskovskii AV, Valdaitsev DA, Oelsner A, Fecher GH, Nepjiko SA, Elmers HJ, Schönhense G (2003) Emission electron microscopy of nanoparticles in strong fs laser fields. Microsc Microanal 9(Suppl. 3):168–16910.1017/S1431927603021020 ↗
36. Cinchetti M, Valdaitsev DA, Gloskovskii A, Oelsner A, Nepijko SA, Schönhense G (2004) Photoemission time-of-flight spectromicroscopy of Ag nanoparticle films on Si(111). J Electr Spectr Rel Phenom 137–140:249–25710.1016/j.elspec.2004.02.052 ↗
37. Cinchetti M, Gloskovskii A, Nepjiko SA, Schönhense G, Rochholz H, Kreiter M (2005) Photoemission electron microscopy as a tool for the investigation of optical near fields. Phys Rev Lett 95:047601/1-410.1103/PhysRevLett.95.047601 ↗
38. de Toro JA, Andrés JP, González JA, Goff JP, Barbero AJ, Riveiro JM (2004) Improved giant magnetoresistance in nanogranular Co/Ag: the role of interparticle RKKY interactions. Phys Rev B 70:224412/1-610.1103/PhysRevB.70.224412 ↗
39. Dittmer G (1972) Electrical conduction and electron emission of discontinuous thin films. Thin Solid Films 9:317–32810.1016/0040-6090(72)90122-8 ↗
40. Dumpich G, Carl A (1991) Anomalous temperature dependence of the phase-coherence length for inhomogeneous gold films. Phys Rev B 43:12074–1207710.1103/PhysRevB.43.12074 ↗
41. Dyukov VG, Kulyupin YuA, Nepijko SA (1977) Film diode. USSR Patent No. 550066, Bull. No. 9, 202
42. Edelman IS, Vorotynova OV, Seredkin VA, Zabluda VN, Ivantsov RD, Gatiyatova YuI, Valeev VF, Khaĭbullin RI, Stepanov AL (2008) Magnetic and magneto-optical properties of ion-synthesized cobalt nanoparticles in silicon oxide. Phys Solid State 50:2088–209410.1134/S1063783408110140 ↗
43. Eilon M, Ding J, Street R (1995) Magnetic and magnetoresistive properties of mechanically alloyed Fe25Cu75. J Phys Condens Matter 7:4921–492810.1088/0953-8984/7/25/015 ↗
44. Elinson (1974) Cold cathodes. Sovetskoe Radio, Moscow
45. Errahmani H, Berrada A, Schmerber G, Dinia A (2000) Magnetic and transport properties of ion beam sputtering Co x Cu1−x granular alloys. Vacuum 56:221–22610.1016/S0042-207X(99)00210-9 ↗
46. Fedorovich RD, Naumovets AG, Ostranitsa AP, Tomchuk PM (1990) Electron emission from regular chain-like island structures. Int J Electron 69:179–18310.1080/00207219008920305 ↗
47. Fedorovich RD, Kiyayev OE, Naumovets AG, Ostranitsa AP (1991) VCNR (switching phenomena) in regular chain-like islands. In: Abstracts of 3 International Workshop “Electronic properties of metal/non metal microsystems”. Kleinheubach (FRG)
48. Fedorovich RD, Naumovets AG, Tomchuk PM (1993) Electronic properties of island thin films caused by surface scattering of electrons. Prog Surf Sci 42:189–20010.1016/0079-6816(93)90069-8 ↗
49. Fedorovich RD, Kiyayev OE, Naumovets AG, Pilipchak KN, Tomchuk PM (1994) Electronic size effects in small metal particles and emission phenomena in island metal films. Phys Low Dim Struct 1:83–92
50. Fedorovich RD, Naumovets AG, Tomchuk PM (1999) Electronic phenomena in nanodispersed thin films. J Phys Condens Matter 11:9955–996710.1088/0953-8984/11/49/313 ↗
51. Fedorovich R, Naumovets A, Tomchuk P (2000) Electron and light emission from island metal films and generation of hot electrons in nanoparticles. Phys Rep 328:73–17910.1016/S0370-1573(99)00094-0 ↗
52. Fitting H-J, Glaefeke H, Wild W (1977) Electron penetration and energy transfere in solid targets. Phys Stat Solidi (a) 43:185–19010.1002/pssa.2210430119 ↗
53. Fu B, Gao L (2006) Tantalum nitride/copper nanocomposite with zero temperature coefficient of resistance. Scripta Mater 55:521–52410.1016/j.scriptamat.2006.05.031 ↗
54. Fujimori H, Mitani S, Ohnuma S (1995) Tunnel-type GMR in metal-nonmetal granular alloy thin films. Mater Sci Eng B 31:219–22310.1016/0921-5107(94)08032-1 ↗
55. Ganichev DA, Dokuchaev VS, Fridrikhov SA, Borziak PG, Zavialov YuG, Kulyupin YuA (1975) Electron emission from discontinuous metal films in UHF Field. Pisma v Zhurnal Tekh Fiz 1:386–388
56. Garron R (1965) Sensibilité photoélectrique des couches minces métalliques. Ann Phys 10:595–62210.1051/anphys/196513100595 ↗
57. Gloskovskii A, Valdaitsev DA, Nepijko SA, Schönhense G (2003) Electrical and emission properties of current-carrying silver nanocluster films investigated by emission electron microscopy. Microsc Microanal 9(Suppl. 3):176–17710.1017/S143192760302110X ↗
58. Gloskovskii A, Valdaitsev D, Nepijko SA, Sedov NN, Schönhense G (2004) Electrical and emission properties of current-carrying silver cluster films detected by an emission electron microscope. Appl Phys A 79:707–71210.1007/s00339-003-2318-y ↗
59. Gloskovskii A, Valdaitsev D, Nepijko SA, Schönhense G, Rethfeld B (2007) Coexisting electron emission mechanisms in small metal particles observed in fs-laser excited PEEM. Surf Sci 601:4706–471310.1016/j.susc.2007.05.046 ↗
60. Gloskovskii A, Valdaitsev DA, Cinchetti M, Nepijko SA, Lange J, Aeschlimann M, Bauer M, Klimenkov M, Viduta LV, Tomchuk PM, Schönhense G (2008) Electron emission from films of Ag and Au nanoparticles excited by a femtosecond pump-probe laser. Phys Rev B 77:195427/1-1110.1103/PhysRevB.77.195427 ↗
61. Gloskovskii A, Valdaitsev D, Viduta LV, Nepijko SA, Schönhense G (2010) Investigation of the local electron emission from current-carrying silver nanoparticle films by an emission electron microscope. Thin Solid Films 518:4030–403410.1016/j.tsf.2010.01.021 ↗
62. Gorban’ SA, Nepijko SA, Tomchuk PM (1991) Electron-phonon interaction in small metal islands deposited on an insulating substrate. Int J Electron 70:485–49010.1080/00207219108921298 ↗
63. Grünberg PA (2001) Exchange anisotropy, interlayer exchange coupling and GMR in research and application. Sens Actuat A 91:153–16010.1016/S0924-4247(01)00513-1 ↗
64. Grünberg PA (2007) From spinwaves to giant magnetoresistance (GMR) and beyond. Nobel Lecture, 92–108
65. Grünberg P, Barnas J, Saurenbach F, Fuß JA, Wolf A, Vohl M (1991) Layered magnetic structures: antiferromagnetic type interlayer coupling and magnetoresistance due to antiparallel alignment. J Magn Magn Mater 93:58–6610.1016/0304-8853(91)90304-S ↗
66. Helman JS, Abeles B (1976) Tunneling of spin-polarized electrons and magnetoresistance in granular Ni films. Phys Rev Lett 37:1429–143210.1103/PhysRevLett.37.1429 ↗
67. Hierold C, Jungen A, Stampfer C, Helbling T (2007) Nano electromechanical sensors based on carbon nanotubes. Sens Actuat A 136:51–6110.1016/j.sna.2007.02.007 ↗
68. Katrich GA, Samoilov VS (1972) About thickness dependence of the work function of photoelectrons from discontinuous gold films. In: Discontinuous Metal Films. Institute of Physics of Acad of Sci of the Ukr. SSR, Kiev, pp 319–324
69. Kim JH, Kim J, Kim ChK, Yoon ChS (2006a) Co–Pt alloy nanoparticles produced using a template of nanoparticle array. J Colloid Interf Sci 303:131–13610.1016/j.jcis.2006.07.018 ↗
70. Kim JW, Lim SK, Kim ChK, Kim Y-H, Yoon ChS (2006b) Fabrication of metallic nanoparticle mono-layer made from selective reaction of Ni100−x Fe x thin films with polyamic acid during its imidization. Colloids Surf A Physicochem Eng Aspects 284–285:350–35410.1016/j.colsurfa.2005.11.054 ↗
71. Kitada M (2000) Magnetoresistance and micristructure of sputtered Au–Co thin films. J Magn Magn Mater 208:244–25010.1016/S0304-8853(99)00561-2 ↗
72. Klein M (1971) Switching and breakdown in films. Thin Solid Films 7:149–17710.1016/0040-6090(71)90067-8 ↗
73. Koh I, Josephson L (2009) Magnetic nanoparticle sensors (review). Sensors 9:8130–814510.3390/s91008130 ↗
74. Konovalov IA, Pilipchak KN, Tomchuk PM (1981) Luminescence of island silver films during passage of an electric current. Opt Spectrosc (USA) 50:348–349
75. Konovalov IA, Fedorovich RD, Nepijko SA, Viduta LV (1997) High sensitive strain microsensor based on dielectric matrix with metal nanoparticles. In: MRS Symp. Proc., vol 459, Pittsburgh (USA), pp 261–265
76. Koppert R, Goettel D, Freitag-Weber O, Schultes G (2009) Nickel containing diamond like carbon thin films. Solid State Sci 11:1797–180010.1016/j.solidstatesciences.2009.04.022 ↗
77. Kulyupin YuA, Pilipchak KN (1972) On the radiation of discontinuous gold films by electric current transmission. Phys Stat Solidi (a) 11:K15–K1910.1002/pssa.2210110144 ↗
78. Kulyupin YuA, Pilipchak KN, Fedorovich RD (1986) The method of light source production. USSR Patent No. 1279433, Bull. No. 40, 11
79. Kulyupin YuA, Nepijko SA, Styopkin VI (1982) Energy distribution of electrons emitted by island-type films. Bull Acad Sci USSR Phys Ser (USA) 46:78–81
80. Lim SK, Yoon ChS, Kim ChK (2004) Fabrication of Ni nanoparticles by selective oxidation of permalloy thin film during imidization of polyamic acid. Chem Commun 810–81110.1039/b316386e ↗
81. Luo JK, Fu YQ, Le HR, Williams JA, Spearing SM, Milne WI (2007) Diamond and diamond-like carbon MEMS. J Micromech Microeng 17:S147–S16310.1088/0960-1317/17/7/S12 ↗
82. Nabika H, Akamatsu K, Mizuhata M, Kajinami A, Deki S (2002) Microstructure and electron transport properties of Au x Co1−x nano-alloys embedded in polyacrylonitrile thin films. J Mater Chem 12:2408–241110.1039/B203600B ↗
83. Nagaev EL (1992) Small metal particles. Sov Phys Usp 35:747–78210.1070/PU1992v035n09ABEH002261 ↗
84. Nepijko SA (1976) Potential distribution in discontinuous metal films under the electric current flow. Mikroelectronica 5:86–89
85. Nepijko SA (1985) Physical properties of small metal particles. Naukova Dumka, Kiev
86. Nepijko SA, Styopkin VI (1982) Some features of the secondary electron emission of island gold-type films. Bull Acad Sci USSR Phys Ser (USA) 46:144–148
87. Nepijko SA, Gorban’ SA, Viduta LV, Fedorovich RD (1992) Energy distribution of IR-induced electron emission from metal island films. Int J Electron 73:1011–101510.1080/00207219208925758 ↗
88. Nepijko S, Schulze W, Rabin I, Viduta L (1998) Regulation of light emission from Ag cluster films under mechanical deformation of elastic substrates. Ann Phys 7:101–10610.1002/andp.2090070204 ↗
89. Nepijko SA, Fedorovich RD, Viduta LV, Ievlev DN, Schulze W (2000) Light emission from Ag cluster films excited by conduction current. Ann Phys 9:125–13110.1002/(SICI)1521-3889(200002)9:2<125::AID-ANDP125>3.0.CO;2-V ↗
90. Nepijko SA, Fedorovich RD, Viduta LV, Ievlev DN, Schulze W (2001a) Light emission from small copper particles exited by current passage or by low-energy electron bombardment. Phys B 301:261–26610.1016/S0921-4526(01)00257-5 ↗
91. Nepijko SA, Ievlev DN, Dan’ko DB, Fedorovich RD, Schulze W, Ertl G (2001b) Electroluminescence spectra of porous silicon as a function of the applied voltage. Phys B 299:32–3510.1016/S0921-4526(00)00766-3 ↗
92. Nepijko SA, Ievlev DN, Schulze W (2001c) Influence of vacuum conditions on the light emission caused by passing a current through a cluster silver film. Phys B 304:45–5010.1016/S0921-4526(01)00550-6 ↗
93. Nepijko SA, Ievlev DN, Viduta LV, Schulze W, Ertl G (2002a) The light emission observed from small palladium particles during passage of electronic current. ChemPhysChem 3:680–68510.1002/1439-7641(20020816)3:8<680::AID-CPHC680>3.0.CO;2-3 ↗
94. Nepijko SA, Sedov NN, Schmidt O, Fecher GH, Schönhense G (2002b) Size of three-dimensional objects measured by means of photoemission electron microscopy. Ann Phys 11:39–4810.1002/1521-3889(200201)11:1<39::AID-ANDP39>3.0.CO;2-9 ↗
95. Nepijko SA, Ievlev DN, Schulze W (2003) Size dependence of the plasmon peak position in electron stimulated photon emission spectra of Ag clusters supported on amorphous carbon film. Eur Phys J D 24:115–11710.1140/epjd/e2003-00164-y ↗
96. Nilius N, Ernst N, Freund H-J (2000) Photon emission spectroscopy in individual oxide-supported silver clusters in a scanning tunnelling microscope. Phys Rev Lett 84:3994–399710.1103/PhysRevLett.84.3994 ↗
97. Nishiura M, Yoshida S, Kinbara A (1973) The strain effect on the electrical conduction in discontinuous gold films. Thin Solid Films 15:133–13910.1016/0040-6090(73)90035-7 ↗
98. Pagnia H, Sotnik N (1988) Bistable switching in electroformed metal-insulator-metal devices. Phys Stat Solidi (a) 108:11–6510.1002/pssa.2211080102 ↗
99. Peiner E, Tibrewala A, Bandorf R, Biehl S, Lüthje H, Doering L (2006) Micro force sensor with piezoresistive amorphous carbon strain gauge. Sens Actuat A 130–131:75–8210.1016/j.sna.2005.11.059 ↗
100. Peiner E, Tibrewala A, Bandorf R, Lüthje H, Doering L, Limmer W (2007) Diamond-like carbon for MEMS. J Micromech Microeng 17:S83–S9010.1088/0960-1317/17/7/S04 ↗