Electrical properties of nano-sized indium tin oxide (ITO) doped with CuO, Cr2O3 and ZrO2
Source abstract
Abstract
Undoped and doped indium tin oxide (ITO) with different concentrations (2, 4, and 6 mol%) of different dopants (CuO, Cr2O3, and ZrO2) were prepared in the nano-size scale (19–33 nm) using Pechini method. The thermal decomposition of the precursors was studied. The electrical properties of all the prepared samples were investigated. All the investigated systems have higher conductivity than that of ITO. For ITO doped with CuO, as the concentration of CuO increases, the conductivity increases. The highest conductivity was obtained for ITO doped with 6 mol% of CuO. For ITO doped with Cr2O3, as the concentration of Cr2O3 increases the conductivity increases and above 4 mol% Cr2O3 the conductivity decreases. For ITO doped with ZrO2, as the ZrO2 concentration increases, the conductivity increases up to 4 mol% of ZrO2 and then decreases. The band gap was detected for all the investigated systems.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: ZnO doping and properties · Gas Sensing Nanomaterials and Sensors · Transition Metal Oxide Nanomaterials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (40)
Show source-provided references
1. Al-Dahoudi N, Aegerter MA (2003) Wet coating deposition of ITO coatings on plastic substrates. J Sol Gel Sci Technol 26:693–69710.1023/A:1020777500940 ↗
2. Antony A, Nisha M, Manoj R, Jayaraj MK (2004) Influence of target to substrate spacing on the properties of ITO thin films. Appl Surf Sci 225:294–30110.1016/j.apsusc.2003.10.017 ↗
3. Baqiah H, Ibrahim NB, Abdi MH, Halim SA (2013) Electrical transport, microstructure and optical properties of Cr-doped In2O3 thin film prepared by sol–gel method. J Alloys Compd 575:198–20610.1016/j.jallcom.2013.04.089 ↗
4. Campet G, Han SD, Wen SJ, Manaud JP, Portier J (1993) The electronic effect of Ti4+, Zr4+ and Ge4+ doping upon the physical properties of In2O3 and Sn-doped In2O3 ceramics: application to new highly-transparent conductive electrodes. Mater Sci Eng B19:285–28910.1016/0921-5107(93)90200-7 ↗
5. Caricato AP, Cesaria M, Luches A, Martino M, Maruccio G et al (2010) Electrical and optical properties of ITO and ITO/Cr-doped ITO films. Appl Phys A 101:753–75810.1007/s00339-010-5988-2 ↗
6. Chion CBS, Tsai JH (1999) Antireflective coating for ITO films deposited on glass substrates. J Mater Sci 10:491–495
7. Chopra KL, Major S, Pandya DK (1983) Transparent conductors. Thin Solid Films 102:1–4610.1016/0040-6090(83)90256-0 ↗
8. Coats AW, Redfern JP (1964) Kinetic parameters from thermogravimetric data. Nature 201:68–6910.1038/201068a0 ↗
9. Coutal C, Azema A, Roustan J-C (1996) Fabrication and characterization of ITO thin films deposited by excimer laser evaporation. Thin Solid Films 288:248–25310.1016/S0040-6090(96)08824-4 ↗
10. Frank G, Kostlin H (1982) Electrical properties and defect model of tin-doped indium oxide layers. Appl Phys A 27:197–20610.1007/BF00619080 ↗
11. Gauckler LJ, Sasaki K (1995) Ionic and electronic conductivities of homogeneous and heterogeneous materials in the system ZrO2-In2O3. Solid State Ionics 75:203–21010.1016/0167-2738(94)00145-I ↗
12. Ginley DS, Bright C (2000) Transparent conducting oxides. MRS Bull 25:15–1810.1557/mrs2000.256 ↗
13. Granqvist C, Hultaker A (2002) Transparent and conductive ITO films new development and applications. Thin Solid Films 411:1–510.1016/S0040-6090(02)00163-3 ↗
14. Gregory OJ, You T, Crisman EE (2005) Effect of aluminum doping on the high-temperature stability and piezoresistive response of indium tin oxide strain sensors. Thin Solid Films 476:34410.1016/j.tsf.2004.10.045 ↗
15. Horowitz HH, Metzger G (1963) A new analysis of thermogravimetric traces. Anal Chem 35:146410.1021/ac60203a013 ↗
16. Hsu CM, Lee JW, Meen TH, Wu WT (2005) Preparation and characterization of Ni–indium tin oxide cosputtered thin films for organic light-emitting diode application. Thin Solid Films 474:19–2410.1016/j.tsf.2004.08.005 ↗
17. Jana S, Biswas PK (2009) Effect of Zr (IV) doping on the optical properties of sol–gel based nanostructured indium oxide films on glass. Mater Chem Phys 117:511–51610.1016/j.matchemphys.2009.06.038 ↗
18. Kerkachea L, Layadia A, Mosserb A (2009) Effect of oxygen partial pressure on the structural and optical properties of dc sputtered ITO thin films. J Alloys Compd 485:46–5010.1016/j.jallcom.2009.06.103 ↗
19. Kim S-M, Seo K-H, Lee J-H, Kim J–J, Lee HY, Lee J-S (2006) Preparation and sintering of nanocrystalline ITO powders with different SnO2 content. J Eur Ceram Soc 26:73–8010.1016/j.jeurceramsoc.2004.10.009 ↗
20. Kumar SRS, Das VD, Kasiviswanathan S (2009) Thermopower and optical studies on undoped and manganese doped indium tin oxide films. Thin Solid Films 518:1390–139310.1016/j.tsf.2009.09.094 ↗
21. Kundu S, Das N, Chakraborty S, Bhattacharya D, Biswas PK (2013) Synthesis of sol–gel based nanostructured Cr(III)-doped indium tin oxide films on glass and their optical and magnetic characterizations. Opt Mater 35:1029–103410.1016/j.optmat.2012.12.005 ↗
22. Lewis BG, Paine DC (2000) Applications and processing of transparent conducting oxides. MRS Bull 25:22–2710.1557/mrs2000.147 ↗
23. Lutterotti L (1997–2013) MAUD version 2.074. http://www.ing.unitn.it/~luttero/maud
24. Lutterotti L, Scardi P, Maistrelli P (1992) LSI—a computer program for simultaneous refinement of material structure and microstructure. J Appl Cryst 25:459–46210.1107/S0021889892001122 ↗
25. Masaya Y, Morikazu K (1998) Raw material for producing powder of indium-tin oxide aciculae and method of producing the raw material, powder of indium-tin oxide aciculae and method of producing the powder, electroconductive paste and light-transmitting electroconductive film. US Patent No 5849221
26. Minami T, Yamamoto T, Toda Y, Miyata T (2000) Transparent conducting zinc- co-doped ITO films prepared by magnetron sputtering. Thin Solid Films 373:18910.1016/S0040-6090(00)01132-9 ↗
27. Mohammadia S, Abdizadeh H, Golobostanfard MR (2013) Opto-electronic properties of molybdenum doped indium tin oxide nanostructured thin films prepared via sol–gel spin coating. Ceram Int 39:6953–696110.1016/j.ceramint.2013.02.032 ↗
28. Pechini MP (1967) Method for preparing lead and alkaline earth titanates and niobates and coating method using the same to form a capacitor. US Patent No 3, 330, 697
29. Rietveld HM (1967) Line profiles of neutron powder-diffraction peaks for structure refinement. Act Cryst 22:151–15210.1107/S0365110X67000234 ↗
30. Rietveld HM (1969) A profile refinement method for nuclear and magnetic structures. J Appl Cryst 2:65–7110.1107/S0021889869006558 ↗
31. Rosario AV, Pereira EC (2006) The effect of composition variables on precursor degradation and their consequence on Nb2O5 film properties prepared by the Pechini method. J Sol Gel Sci Technol 38:233–24010.1007/s10971-006-7997-3 ↗
32. Sasaki K (1993) Phase Equilibria, electrical conductivity and electrochemical properties of ZrO2-In2O3. PhD dissertation, Swiss Federal Institute of Technology, Zurich
33. Suzuki M, Maeda Y, Muraoka M, Higuchi S, Sawada Y (1998) ITO films sputter-deposited using an ITO target sintered with vanadium oxide additive. Mater Sci Eng B 54:43–4510.1016/S0921-5107(98)00124-X ↗
34. Tseng S, Hsiao W, Huang K-C, Chiang D, Chen M-F, Chou C-P (2010) Laser scribing of indium tin oxide (ITO) thin films deposited on various substrates for touch panels. Appl Surf Sci 257:1487–149410.1016/j.apsusc.2010.08.080 ↗
35. Ukah NB, Gupta RK, Kahol PK, Ghosh K (2009) Influence of oxygen growth pressure on laser ablated Cr-doped In2O3 thin films. Appl Surf Sci 255:9420–942410.1016/j.apsusc.2009.07.045 ↗
36. Ye F, Cai X-M, Dai F-P, Jing S-Y, Zhang D-P, Fan P, Liu L-J (2011) Cu–In–O composite thin films deposited by reactive DC magnetron sputtering. Phys B 406:516–51910.1016/j.physb.2010.11.026 ↗
37. Young RA, Wiles DB (1982) Profile shape functions in Rietveld refinements. J Appl Cryst 15:430–43810.1107/S002188988201231X ↗
38. Youssef AM, Abbas HA, Hammad FF, Hassan AMA, Hanafi ZM (2012) X-ray diffraction and IR spectroscopy for nano-sized ITO doped with some metal oxides. Life Sci J 9:946–952
39. Zhang B, Dong X, Xu X, Zhao P, Wu J (2008) Characteristics of zirconium-doped indium tin oxide thin films deposited by magnetron sputtering. Sol Energy Mat Sol Cells 92:1224–122910.1016/j.solmat.2008.04.019 ↗
40. Zuo Y, Ge S, Yu Z, Yan S, Zhou X, Zhang L (2010) Electrical and ferromagnetic properties of Tb-doped indium–tin oxide films fabricated by sol–gel method. Appl Surf Sci 256:6013–601710.1016/j.apsusc.2010.03.111 ↗