Supersonic cluster beam fabrication of metal–ionogel nanocomposites for soft robotics
Source abstract
Abstract
Soft robotics is an emerging field targeting at the development of robotic bodies and architectures characterized by flexibility, adaptability, and motility typical of that of biological systems. The use of electroactive ionic polymer–metal nanocomposites able to reversibly deform in response to low-intensity electric fields constitutes a promising solution for the implementation of actuators into soft robots. Currently, the use of this class of nanocomposites is hampered by several drawbacks, mainly related to the mismatch between the mechanical properties of the polymer and the metallic electrodes compromising their stability and resilience upon cyclic deformation. Here, we report and discuss on the use of supersonic cluster beam implantation (SCBI) as an effective strategy for the fabrication of soft electroactive ionic polymeric nanocomposite actuators. SCBI relies on the use of supersonically accelerated beams of neutral metal nanoparticles that can be aerodynamically collimated and directed onto a polymeric target to generate thin nanostructured metal layers physically interpenetrating with the polymer. Soft electroactive actuators based on engineered ionogel and ionogel-based hybrid nanocomposites provided with monolithically integrated cluster-assembled gold electrodes will be discussed. These systems can undergo long-term bending deformation in a low-voltage regime, due to the nanostructured electrode resilience. The use of cluster-assembled nanostructured electrodes opens new opportunities for the high-throughput manufacturing of soft ionic actuators with excellent mechanical resiliency, high-performance actuation, and high durability.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Dielectric materials and actuators · Advanced Sensor and Energy Harvesting Materials · Polymer Surface Interaction Studies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (100+)
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1. Ambrosetti G, Balberg I, Grimaldi C (2010) Percolation-to-hopping crossover in conductor-insulator composites. Phys Rev B Condens Matter Mater Phys 82. https://doi.org/10.1103/PhysRevB.82.13420110.1103/PhysRevB.82.134201 ↗
2. Argentiere S, Gigli G, Mortato M et al (2012) Smart microfluidics: the role of stimuli-responsive polymers in microfluidic devices, advances in microfluidics. Adv Microfluid. https://doi.org/10.5772/3807210.5772/38072 ↗
3. Asaka K (2012) Soft actuators10.1002/9783527646982.ch13 ↗
4. Bahramzadeh Y, Shahinpoor M (2013) A Review of Ionic Polymeric Soft Actuators and Sensors. Soft Robot 1:38–52. https://doi.org/10.1089/soro.2013.000610.1089/soro.2013.0006 ↗
5. Bar-Cohen Y (2000) Electroactive polymers as artificial muscles—capabilities, potentials, and challenges. Robot 2000:188–196. https://doi.org/10.1061/40476(299)2410.1061/40476(299)24 ↗
6. Bar-Cohen Y (2002) Electroactive polymers as artificial muscles: a review. J Spacecr Rocket 39:822–827. https://doi.org/10.2514/2.390210.2514/2.3902 ↗
7. Bassil M, El Tahchi M, Souaid E et al (2008) Electrochemical and electromechanical properties of fully hydrolyzed polyacrylamide for applications in biomimetics. Smart Mater Struct 17. https://doi.org/10.1088/0964-1726/17/5/05501710.1088/0964-1726/17/5/055017 ↗
8. Bauer S, Bauer-Gogonea S, Graz I, Kaltenbrunner M, Keplinger C, Schwödiauer R (2014) 25th Anniversary article: a soft future: from robots and sensor skin to energy harvesters. Adv Mater 26:149–16210.1002/adma.201303349 ↗
9. Bennett MD, Leo DJ (2004) Ionic liquids as stable solvents for ionic polymer transducers. Sensors Actuators A Phys 115:79–90. https://doi.org/10.1016/j.sna.2004.03.04310.1016/j.sna.2004.03.043 ↗
10. Bhandari B, Lee GY, Ahn SH (2012) A review on IPMC material as actuators and sensors: fabrications, characteristics and applications. Int J Precis Eng Manuf 13:141–16310.1007/s12541-012-0020-8 ↗
11. Borghi F, Melis C, Ghisleri C, Podestà A, Ravagnan L, Colombo L, Milani P (2015) Stretchable nanocomposite electrodes with tunable mechanical properties by supersonic cluster beam implantation in elastomers. Appl Phys Lett 106:121902. https://doi.org/10.1063/1.491635010.1063/1.4916350 ↗
12. Brochu P, Pei Q (2010) Advances in dielectric elastomers for actuators and artificial muscles. Macromol Rapid Commun 31:10–3610.1002/marc.200900425 ↗
13. Buchtová N, Guyomard-Lack A, Le Bideau J (2014) Biopolymer based nanocomposite ionogels: high performance, sustainable and solid electrolytes. Green Chem 16:1149–1152. https://doi.org/10.1039/c3gc42022a10.1039/c3gc42022a ↗
14. Calvert P (2009) Hydrogels for soft machines. Adv Mater 21:743–756. https://doi.org/10.1002/adma.20080053410.1002/adma.200800534 ↗
15. Carpi F, Bauer S, De Rossi D (2010) Stretching dielectric elastomer performance. Science 330:1759–1761. https://doi.org/10.1126/science.119477310.1126/science.1194773 ↗
16. Carrico JD, Tyler T, Leang KK (2017) A comprehensive review of select smart polymeric and gel actuators for soft mechatronics and robotics applications: fundamentals, freeform fabrication, and motion control. Int J Smart Nano Mater 8:144–213. https://doi.org/10.1080/19475411.2018.143853410.1080/19475411.2018.1438534 ↗
17. Chiba S, Hasegawa K, Waki M et al (2017) Innovative elastomer transducer driven by Karman vortices in water flow. 7:121–135. https://doi.org/10.17265/2161-6213/2017.5-6.00210.17265/2161-6213/2017.5-6.002 ↗
18. Corbelli G, Ghisleri C, Marelli M, Milani P, Ravagnan L (2011) Highly deformable nanostructured elastomeric electrodes with improving conductivity upon cyclical stretching. Adv Mater 23:4504–4508. https://doi.org/10.1002/adma.20110246310.1002/adma.201102463 ↗
19. Csoka L, Hoeger IC, Rojas OJ, Peszlen I, Pawlak JJ, Peralta PN (2012) Piezoelectric effect of cellulose nanocrystals thin films. ACS Macro Lett 1:867–870. https://doi.org/10.1021/mz300234a10.1021/mz300234a ↗
20. Dobrynin AV, Rubinstein M (2005) Theory of polyelectrolytes in solutions and at surfaces. Prog Polym Sci 30:1049–1118. https://doi.org/10.1016/j.progpolymsci.2005.07.00610.1016/j.progpolymsci.2005.07.006 ↗
21. Doi M, Matsumoto M, Hirose Y (1992) Deformation of ionic polymer gels by electric fields. Macromolecules 25:5504–5511. https://doi.org/10.1021/ma00046a05810.1021/ma00046a058 ↗
22. Duncan AJ, Leo DJ, Long TE (2008) Beyond Nafion: charged macromolecules tailored for performance as ionic polymer transducers. Macromolecules 41:7766–777510.1021/ma800956v ↗
23. Faupel F, Zaporojtchenko V, Strunskus T, Elbahri M (2010) Metal-polymer nanocomposites for functional applications. In: Advanced engineering materials. pp 1177–119010.1002/adem.201000231 ↗
24. Fukushima T, Asaka K, Kosaka A, Aida T (2005) Fully plastic actuator through layer-by-layer casting with ionic-liquid-based bucky gel. Angew Chemie - Int Ed 44:2410–2413. https://doi.org/10.1002/anie.20046231810.1002/anie.200462318 ↗
25. Galluzzi M, Bovio S, Milani P, Podestà A (2018) Surface confinement induces the formation of solid-like insulating ionic liquid nanostructures. J Phys Chem C 122:7934–7944. https://doi.org/10.1021/acs.jpcc.7b1260010.1021/acs.jpcc.7b12600 ↗
26. Gayet F, Viau L, Leroux F, Monge S, Robin JJ, Vioux A (2010) Polymer nanocomposite ionogels, high-performance electrolyte membranes. J Mater Chem 20:9456–9462. https://doi.org/10.1039/c000033g10.1039/c000033g ↗
27. Ghisleri C, Borghi F, Ravagnan L, Podestà A, Melis C, Colombo L, Milani P (2014) Patterning of gold–polydimethylsiloxane (Au–PDMS) nanocomposites by supersonic cluster beam implantation. J Phys D Appl Phys 47:015301. https://doi.org/10.1088/0022-3727/47/1/01530110.1088/0022-3727/47/1/015301 ↗
28. Glazer PJ, van Erp M, Embrechts A, Lemay SG, Mendes E (2012) Role of pH gradients in the actuation of electro-responsive polyelectrolyte gels. Soft Matter 8:4421. https://doi.org/10.1039/c2sm07435d10.1039/c2sm07435d ↗
29. Gong JP, Nitta T, Osada Y (1994) Electrokinetic modeling of the contractile phenomena of polyelectrolyte gels. One-dimensional capillary model. J Phys Chem 98:9583–9587. https://doi.org/10.1021/j100089a03610.1021/j100089a036 ↗
30. He Z, Alexandridis P (2015) Nanoparticles in ionic liquids: interactions and organization. Phys Chem Chem Phys 17:18238–18261. https://doi.org/10.1039/C5CP01620G10.1039/C5CP01620G ↗
31. Hines L, Petersen K, Lum GZ, Sitti M (2017) Soft actuators for small-scale robotics. Adv Mater 2910.1002/adma.201603483 ↗
32. Horowitz AI, Panzer MJ (2014) Poly(dimethylsiloxane)-supported ionogels with a high ionic liquid loading. Angew Chem Int Ed 53:9780–9783. https://doi.org/10.1002/anie.20140569110.1002/anie.201405691 ↗
33. Hunt A, Chen Z, Tan X, Kruusmaa M (2016) An integrated electroactive polymer sensor-actuator: design, model-based control, and performance characterization. Smart Mater Struct 25:035016. https://doi.org/10.1088/0964-1726/25/3/03501610.1088/0964-1726/25/3/035016 ↗
34. Ilievski F, Mazzeo AD, Shepherd RF, Chen X, Whitesides GM (2011) Soft robotics for chemists. Angew Chem Int Ed 50:1890–1895. https://doi.org/10.1002/anie.20100646410.1002/anie.201006464 ↗
35. Ionov L (2013) Biomimetic hydrogel-based actuating systems. Adv Funct Mater 23:4555–4570. https://doi.org/10.1002/adfm.20120369210.1002/adfm.201203692 ↗
36. Ionov L (2014) Hydrogel-based actuators: possibilities and limitations. Mater Today 17:494–50310.1016/j.mattod.2014.07.002 ↗
37. Ionov L (2015) Polymeric actuators. Langmuir 31:5015–5024. https://doi.org/10.1021/la503407z10.1021/la503407z ↗
38. Jabbari E, Tavakoli J, Sarvestani AS (2007) Swelling characteristics of acrylic acid polyelectrolyte hydrogel in a dc electric field. Smart Mater Struct 16:1614–1620. https://doi.org/10.1088/0964-1726/16/5/01510.1088/0964-1726/16/5/015 ↗
39. Jo C, Pugal D, Oh IK, Kim KJ, Asaka K (2013) Recent advances in ionic polymer-metal composite actuators and their modeling and applications. Prog Polym Sci 38:1037–1066. https://doi.org/10.1016/j.progpolymsci.2013.04.00310.1016/j.progpolymsci.2013.04.003 ↗
40. Kango S, Kalia S, Celli A, Njuguna J, Habibi Y, Kumar R (2013) Surface modification of inorganic nanoparticles for development of organic-inorganic nanocomposites—a review. Prog Polym Sci 38:1232–1261. https://doi.org/10.1016/j.progpolymsci.2013.02.00310.1016/j.progpolymsci.2013.02.003 ↗
41. Kataoka T, Ishioka Y, Mizuhata M, Minami H, Maruyama T (2015) Highly conductive ionic-liquid gels prepared with orthogonal double networks of a low-molecular-weight gelator and cross-linked polymer. ACS Appl Mater Interfaces 7:23346–23352. https://doi.org/10.1021/acsami.5b0798110.1021/acsami.5b07981 ↗
42. Kim KJ, Shahinpoor M (2003) Ionic polymer metal composites: II. Manufacturing techniques. Smart Mater Struct 12:65–79. https://doi.org/10.1088/0964-1726/12/1/30810.1088/0964-1726/12/1/308 ↗
43. Kim KJ, Tadokoro S (2007) Electroactive polymers for robotic applications10.1007/978-1-84628-372-7 ↗
44. Kim S, Laschi C, Trimmer B (2013) Soft robotics: a bioinspired evolution in robotics. Trends Biotechnol 31:287–29410.1016/j.tibtech.2013.03.002 ↗
45. Kim J, Jeon JH, Kim HJ, Lim H, Oh IK (2014) Durable and water-floatable ionic polymer actuator with hydrophobic and asymmetrically laser-scribed reduced graphene oxide paper electrodes. ACS Nano 8:2986–2997. https://doi.org/10.1021/nn500283q10.1021/nn500283q ↗
46. Kim JH, Shim BS, Kim HS, Lee YJ, Min SK, Jang D, Abas Z, Kim J (2015) Review of nanocellulose for sustainable future materials. Int J Precis Eng Manuf Green Technol 2:197–213. https://doi.org/10.1007/s40684-015-0024-910.1007/s40684-015-0024-9 ↗
47. Kusoglu A, Weber AZ (2015) Electrochemical/mechanical coupling in ion-conducting soft matter. J Phys Chem Lett 6:4547–455210.1021/acs.jpclett.5b01639 ↗
48. Laschi C, Cianchetti M (2014) Soft robotics: new perspectives for robot bodyware and control. Front Bioeng Biotechnol 2. https://doi.org/10.3389/fbioe.2014.0000310.3389/fbioe.2014.00003 ↗
49. Le Bideau J, Viau L, Vioux A (2011) Ionogels, ionic liquid based hybrid materials. Chem Soc Rev 40:907–925. https://doi.org/10.1039/c0cs00059k10.1039/c0cs00059k ↗
50. Lee JW, Yoo YT, Lee JY (2014) Ionic polymer-metal composite actuators based on triple-layered polyelectrolytes composed of individually functionalized layers. ACS Appl Mater Interfaces 6:1266–1271. https://doi.org/10.1021/am405090d10.1021/am405090d ↗
51. Lipson H (2014) Challenges and opportunities for design, simulation, and fabrication of soft robots. Soft Robot 1:21–27. https://doi.org/10.1089/soro.2013.000710.1089/soro.2013.0007 ↗
52. Liu YD, Choi HJ (2013) Recent progress in smart polymer composite particles in electric and magnetic fields. Polym Int 62:147–15110.1002/pi.4441 ↗
53. Liu X, He B, Wang Z, Tang H, Su T, Wang Q (2014) Tough nanocomposite ionogel-based actuator exhibits robust performance. Sci Rep 4. https://doi.org/10.1038/srep0667310.1038/srep06673 ↗
54. López-Barrón CR, Beltramo PJ, Liu Y, Choi SM, Lee MJ (2016) Mechanical, dielectric and structural characterization of cross-linked PEG-diacrylate/ethylammonium nitrate ionogels. Polymer (United Kingdom) 87:300–307. https://doi.org/10.1016/j.polymer.2016.02.00810.1016/j.polymer.2016.02.008 ↗
55. Lovestead TM, Brien AKO, Bowman CN (2003) Models of multivinyl free radical photopolymerization kinetics. 159:135–143. https://doi.org/10.1016/S1010-6030(03)00178-310.1016/S1010-6030(03)00178-3 ↗
56. Lu N, Kim D-H (2014) Flexible and stretchable electronics paving the way for soft robotics. Soft Robot 1:53–62. https://doi.org/10.1089/soro.2013.000510.1089/soro.2013.0005 ↗
57. Manouras T, Vamvakaki M (2016) Field responsive materials: photo-, electro-, magnetic- and ultrasound-sensitive polymers. Polym Chem 8:74–96. https://doi.org/10.1039/c6py01455k10.1039/c6py01455k ↗
58. Marelli M, Divitini G, Collini C, Ravagnan L, Corbelli G, Ghisleri C, Gianfelice A, Lenardi C, Milani P, Lorenzelli L (2011) Flexible and biocompatible microelectrode arrays fabricated by supersonic cluster beam deposition on SU-8. J Micromech Microeng 21:045013. https://doi.org/10.1088/0960-1317/21/4/04501310.1088/0960-1317/21/4/045013 ↗
59. Marr PC, Marr AC (2015) Ionic liquid gel materials: applications in green and sustainable chemistry. Green Chem 18:105–128. https://doi.org/10.1039/C5GC02277K10.1039/C5GC02277K ↗
60. Messner PWC, Paik J, Shepherd R et al (2014) Energy for biomimetic robots: challenges and solutions. Soft Robot 1:106–109. https://doi.org/10.1089/soro.2014.150110.1089/soro.2014.1501 ↗
61. Migliorini L, Santaniello T, Yan Y, Lenardi C, Milani P (2016) Low-voltage electrically driven homeostatic hydrogel-based actuators for underwater soft robotics. Sensors Actuators B Chem 228:758–766. https://doi.org/10.1016/j.snb.2016.01.11010.1016/j.snb.2016.01.110 ↗
62. Mirfakhrai T, Madden JDW, Baughman RH (2007) Polymer artificial muscles. Mater Today 10:30–38. https://doi.org/10.1016/S1369-7021(07)70048-210.1016/S1369-7021(07)70048-2 ↗
63. Mirvakili SM, Hunter IW (2017) Artificial muscles: mechanisms, applications, and challenges. Adv Mater 1704407. https://doi.org/10.1002/adma.20170440710.1002/adma.201704407 ↗
64. Moganty SS, Srivastava S, Lu Y, Schaefer JL, Rizvi SA, Archer LA (2012) Ionic liquid-tethered nanoparticle suspensions: a novel class of ionogels. Chem Mater 24:1386–1392. https://doi.org/10.1021/cm300424v10.1021/cm300424v ↗
65. Morales D, Palleau E, Dickey MD, Velev OD (2014) Electro-actuated hydrogel walkers with dual responsive legs. Soft Matter 10:1337–1348. https://doi.org/10.1039/C3SM51921J10.1039/C3SM51921J ↗
66. Nemat-Nasser S (2002) Micromechanics of actuation of ionic polymer-metal composites. J Appl Phys 92:2899–2915. https://doi.org/10.1063/1.149588810.1063/1.1495888 ↗
67. O’Halloran A, O’Malley F, McHugh P (2008) A review on dielectric elastomer actuators, technology, applications, and challenges. J Appl Phys 104:071101. https://doi.org/10.1063/1.298164210.1063/1.2981642 ↗
68. Okazaki H, Sawada S, Kimura M, Tanaka H, Matsumoto T, Ohtake T, Inoue S (2012) Soft actuator using ionic polymer-metal composite composed of gold electrodes deposited using vacuum evaporation. IEEE Electron Device Lett 33. https://doi.org/10.1109/LED.2012.219697010.1109/LED.2012.2196970 ↗
69. Park K, Yoon MK, Lee S, Choi J, Thubrikar M (2010) Effects of electrode degradation and solvent evaporation on the performance of ionic-polymer-metal composite sensors. Smart Mater Struct 19:075002. https://doi.org/10.1088/0964-1726/19/7/07500210.1088/0964-1726/19/7/075002 ↗
70. Pelrine R, Kornbluh R, Pei Q, Joseph J (2000) High-speed electrically actuated elastomers with strain greater than 100%. Science 287:836–839. https://doi.org/10.1126/science.287.5454.83610.1126/science.287.5454.836 ↗
71. Piseri P, Tafreshi HV, Milani P (2004) Manipulation of nanoparticles in supersonic beams for the production of nanostructured materials. Curr Opin Solid State Mater Sci 8:195–20210.1016/j.cossms.2004.08.002 ↗
72. Pugal D, Jung K, Aabloo A, Kim KJ (2010) Ionic polymer-metal composite mechanoelectrical transduction: review and perspectives. Polym Int 59:279–28910.1002/pi.2759 ↗
73. Qin H, Panzer MJ (2017) Chemically cross-linked poly(2-hydroxyethyl methacrylate)-supported deep eutectic solvent gel electrolytes for eco-friendly supercapacitors. ChemElectroChem 4:2556–2562. https://doi.org/10.1002/celc.20170058610.1002/celc.201700586 ↗
74. Rahman M, Brazel CS (2006) Ionic liquids: new generation stable plasticizers for poly(vinyl chloride). Polym Degrad Stab 91:3371–3382. https://doi.org/10.1016/j.polymdegradstab.2006.05.01210.1016/j.polymdegradstab.2006.05.012 ↗
75. Ravagnan L, Divitini G, Rebasti S et al (2009) Poly(methyl methacrylate)–palladium clusters nanocomposite formation by supersonic cluster beam deposition: a method for microstructured metallization of polymer surfaces. 82002. https://doi.org/10.1088/0022-3727/42/8/08200210.1088/0022-3727/42/8/082002 ↗
76. Rich SI, Wood RJ, Majidi C (2018) Untethered soft robotics. Nat Electron 1:102–112. https://doi.org/10.1038/s41928-018-0024-110.1038/s41928-018-0024-1 ↗
77. Rogers JA (2013) A clear advance in soft actuators. Science 341:968–96910.1126/science.1243314 ↗
78. Rogers JA, Someya T, Huang Y (2010) Materials and mechanics for stretchable electronics. Science 327:1603–160710.1126/science.1182383 ↗
79. Rus D, Tolley MT (2015) Design, fabrication and control of soft robots. Nature 521:467–47510.1038/nature14543 ↗
80. Saito S, Katoh Y, Kokubo H, Watanabe M, Maruo S (2009) Development of a soft actuator using a photocurable ionic gel. J Micromech Microeng 19. https://doi.org/10.1088/0960-1317/19/3/03500510.1088/0960-1317/19/3/035005 ↗
81. Santaniello T, Migliorini L, Locatelli E, Monaco I, Yan Y, Lenardi C, Comes Franchini M, Milani P (2017) Hybrid nanocomposites based on electroactive hydrogels and cellulose nanocrystals for high-sensitivity electro-mechanical underwater actuation. Smart Mater Struct 26:85030. https://doi.org/10.1088/1361-665X/aa7cb610.1088/1361-665X/aa7cb6 ↗
82. Santaniello T, Migliorini L, Borghi F, Yan Y, Rondinini S, Lenardi C, Milani P (2018) Spring-like electroactive actuators based on paper/ionogel/metal nanocomposites. Smart Mater Struct 27:065004. https://doi.org/10.1088/1361-665X/aabc3210.1088/1361-665X/aabc32 ↗
83. Schexnailder P, Schmidt G (2009) Nanocomposite polymer hydrogels. Colloid Polym Sci 287:1–11. https://doi.org/10.1007/s00396-008-1949-010.1007/s00396-008-1949-0 ↗
84. Shahinpoor M, Kim KJ (2000) Effect of surface-electrode resistance on the performance of ionic polymer-metal composite (IPMC) artificial muscles. Smart Mater Struct 9:543–551. https://doi.org/10.1088/0964-1726/9/4/31810.1088/0964-1726/9/4/318 ↗
85. Shahinpoor M, Kim KJ (2001) Ionic polymer-metal composites: I. Fundamentals. Smart Mater Struct 10:819–833. https://doi.org/10.1088/0964-1726/10/4/32710.1088/0964-1726/10/4/327 ↗
86. Shi Y, Zhang J, Pan L, Shi Y, Yu G (2016) Energy gels: a bio-inspired material platform for advanced energy applications. Nano Today 11:738–762. https://doi.org/10.1016/j.nantod.2016.10.00210.1016/j.nantod.2016.10.002 ↗
87. Shiga T (1997) Deformation and viscoelastic behavior of polymer gels in electric fields. Adv Polym Sci 134:131–163. https://doi.org/10.1007/3-540-68449-2_210.1007/3-540-68449-2_2 ↗
88. Shiga T, Hirose Y, Okada A, Kurauchi T (1994) Deformation of ionic polymer gel films in electric fields. J Mater Sci 29:5715–5718. https://doi.org/10.1007/BF0034997010.1007/BF00349970 ↗
89. Shin MK, Spinks GM, Shin SR, Kim SI, Kim SJ (2009) Nanocomposite hydrogel with high toughness for bioactuators. Adv Mater 21:1712–1715. https://doi.org/10.1002/adma.20080220510.1002/adma.200802205 ↗
90. Taccola S, Bellacicca A, Milani P, Beccai L, Greco F (2018) Low-voltage dielectric elastomer actuators with stretchable electrodes fabricated by supersonic cluster beam implantation. J Appl Phys 124:064901. https://doi.org/10.1063/1.503865910.1063/1.5038659 ↗
91. Takele H, Jebril S, Strunskus T, Zaporojchenko V, Adelung R, Faupel F (2008) Tuning of electrical and structural properties of metal-polymer nanocomposite films prepared by co-evaporation technique. Appl Phys A Mater Sci Process 92:345–350. https://doi.org/10.1007/s00339-008-4524-010.1007/s00339-008-4524-0 ↗
92. Tanaka T, Nishio I, Sun S-T, Ueno-Nishio S (1982) Collapse of gels in an electric field. Science 218:467–469. https://doi.org/10.1126/science.218.4571.46710.1126/science.218.4571.467 ↗
93. Thiemann S, Sachnov SJ, Pettersson F, Bollström R, Österbacka R, Wasserscheid P, Zaumseil J (2014) Cellulose-based ionogels for paper electronics. Adv Funct Mater 24:625–634. https://doi.org/10.1002/adfm.20130202610.1002/adfm.201302026 ↗
94. Tiwari R, Garcia E (2011) The state of understanding of ionic polymer metal composite architecture: a review. Smart Mater Struct 20:083001. https://doi.org/10.1088/0964-1726/20/8/08300110.1088/0964-1726/20/8/083001 ↗
95. Totaro M, Mondini A, Bellacicca A et al (2017) Integrated simultaneous detection of tactile and bending cues for soft robotics. Soft Robot. https://doi.org/10.1089/soro.2016.004910.1089/soro.2016.0049 ↗
96. Trimmer B (2013) Soft robots. Curr Biol 23:R639–R64110.1016/j.cub.2013.04.070 ↗
97. Trivedi D, Rahn CD, Kier WM, Walker ID (2008) Soft robotics: biological inspiration, state of the art, and future research. Appl Bionics Biomech 5:99–117. https://doi.org/10.1080/1176232080255786510.1080/11762320802557865 ↗
98. Wang J, Xu C, Taya M, Kuga Y (2007) A flemion-based actuator with ionic liquid as solvent. Smart Mater Struct 16:S214–S219. https://doi.org/10.1088/0964-1726/16/2/S0310.1088/0964-1726/16/2/S03 ↗
99. Wang X, Dong L, Zhang H et al (2015) Recent progress in electronic skin. Adv Sci 210.1002/advs.201500169 ↗
100. Wegner K, Piseri P, Tafreshi HV, Milani P (2006) Cluster beam deposition: a tool for nanoscale science and technology. J Phys D Appl Phys 39:R439–R45910.1088/0022-3727/39/22/R02 ↗