Synthesis of Si nanoparticles with narrow size distribution by pulsed laser ablation
Source abstract
Abstract
We synthesized Si nanoparticles by pulsed nanosecond-laser ablation. We applied a positive voltage bias during laser irradiation and effectively reduced size distribution. Scanning electron micrographs of samples showed the nanoparticles to be highly non-agglomerated. Si nanoparticles have the average diameter of 4–5 nm, the geometrical standard deviation of 1.35, and the density of 1.6 × 1012/cm2. A MOS device showed excellent charge trap behavior with a flat-band voltage shift over 7 V, which can be applied for memory device applications.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Silicon Nanostructures and Photoluminescence · Ion-surface interactions and analysis · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (19)
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1. Amoruso S, Bruzzese R, Spinelli N, Velotta R (1999) Characterization of laser-ablation plasmas. J Phys B 32:R131–R172. doi: 10.1088/0953-4075/32/14/20110.1088/0953-4075/32/14/201 ↗
2. Bulgakova NM, Stoian R, Rosenfeld A, Hertel IV, Campbell EEB (2004) Electronic transport and consequences for material removal in ultrafast pulsed laser ablation of materials. Phys Rev B 69:054102-1–054102-12. doi: 10.1103/PhysRevB.69.05410210.1103/PhysRevB.69.054102 ↗
3. Franklin SR, Thareja RK (2005) Simulation of cluster formation in laser-ablated silicon plumes. J Appl Phys 97:123303-1–123303-6. doi: 10.1063/1.1931028
4. Gouriet K, Zhigilei LV, Itina TE (2009) Molecular dynamics study of nanoparticle evolution in a background gas under laser ablation conditions. Appl Surf Sci 255:5116–5119. doi: 10.1016/j.apsusc.2008.07.09710.1016/j.apsusc.2008.07.097 ↗
5. Hontanon E, Kruis FE (2009) A differential mobility analyzer (DMA) for size selection of nanoparticles at high flow rates. Aerosol Sci Technol 43:25–37. doi: 10.1080/0278682080244681210.1080/02786820802446812 ↗
6. Kiss LB, Söderlund J, Niklasson GA, Granqvist CG (1999) New approach to the origin of lognormal size distributions of nanoparticles. Nanotechnology 10:25–28. doi: 10.1088/0957-4484/10/1/00610.1088/0957-4484/10/1/006 ↗
7. Makino T, Suzuki N, Yamada Y, Yoshida T, Seto T, Aya N (1999) Size classification of Si nanoparticles formed by Pulsed Laser Ablation in helium background gas. Appl Phys A 69:S243–S247. doi: 10.1007/s00339990030310.1007/s003399900303 ↗
8. Marine W, Bulgakova NM, Patrone L, Ozerov I (2008) Insight into electronic mechanisms of nanosecond-laser ablation of silicon. J Appl Phys 103:094902. doi: 10.1063/1.290352710.1063/1.2903527 ↗
9. Muramoto J, Sakamoto I, Nakata Y, Okada T, Maeda M (1999) Influence of electric field on the behavior of Si nanoparticles generated by laser ablation. Appl Phys Lett 75:751–753. doi: 10.1063/1.12450110.1063/1.124501 ↗
10. Nichols WT, Malyavanatham G, Henneke DE, Brook JR, Becker MF, Keto JW, Glicksman HD (2000) Gas and pressure dependence for the mean size of nanoparticles produced by laser ablation of flowing aerosols. J Nanopart Res 2:141–145. doi: 10.1023/A:101001400450810.1023/A:1010014004508 ↗
11. Nichols WT, Keto JW, Henneke DE, Brock JR, Malyavanatham G, Becker MF, Glicksman HD (2001) Large-scale production of nanocrystals by laser ablation of microparticles in a flowing aerosol. Appl Phys Lett 78:1128–1130. doi: 10.1063/1.134738510.1063/1.1347385 ↗
12. Ohyanagi T, Miyashita A, Murakami K, Yoda O (1994) Time-and-space resolved X-ray absorption spectroscopy of laser-ablated Si particles. Jpn J Appl Phys 33:2586–2592. doi: 10.1143/JJAP.33.258610.1143/JJAP.33.2586 ↗
13. Ostraat ML, De Blauwe JW, Green ML, Bell LD, Atwater HA, Flagan RC (2001) Ultraclean two-stage aerosol reactor for production of oxide-passivated silicon nanoparticles for novel memory devices. J Electrochem Soc 148:G265–G270. doi: 10.1149/1.136021010.1149/1.1360210 ↗
14. Peterlongo A, Miotello A, Kelly R (1994) Laser-pulse sputtering of aluminum: vaporization, boiling, superheating, and gas-dynamic effects. Phys Rev E Stat Phys Plasmas Fluids Relat Interdiscip Topics 50:4716–4727. doi: 10.1103/PhysRevE.50.4716
15. Raizer YP (1960) Condensation of a cloud of vaporised matter expanding in a vacuum. Sov Phys JETP 37:1229–1235
16. Sakka T, Hotta K, Kuroyanagi A, Akiba S, Mabuchi M, Ogata YH (1998) Characteristics of the species ablated from silicon surface by pulsed CO2 laser irradiation. Jpn J Appl Phys 37:2666–2669. doi: 10.1143/JJAP.37.266610.1143/JJAP.37.2666 ↗
17. Shinn GB, Steigerwald F, Stiegler H, Sauerbrey R, Tittel FK, Wilson WL Jr (1986) Excimer laser photoablation of silicon. J Vac Sci Technol B 4:1273–1277. doi: 10.1116/1.58350510.1116/1.583505 ↗
18. Stoian R, Rosenfeld A, Ashkenasi D, Hertel IV, Bulgakova NM, Campbell EEB (2002) Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation. Phys Rev Lett 88:097603-1–097603-4. doi: 10.1103/PhysRevLett.88.09760310.1103/PhysRevLett.88.097603 ↗
19. Tiwari S, Rana F, Hanafi H, Hartstein A, Crabbé EF, Chan K (1996) A silicon nanocrystals based memory. Appl Phys Lett 68:1377–1379. doi: 10.1063/1.11608510.1063/1.116085 ↗