Chemical vapor synthesis of fluorine-doped SnO2 (FTO) nanoparticles
Source abstract
Abstract
The synthesis and properties of nanocrystalline SnO2 particles and the effects of doping with fluorine are reported in this work. Simultaneous thermal decomposition of tetramethyltin and difluoromethane in the chemical vapor synthesis process was employed. The nanoparticles were analyzed with respect to their structure using X-ray diffraction followed by Rietveld refinement, transmission electron microscopy, nitrogen adsorption, X-ray photoelectron spectroscopy, and Fourier-transformed infrared spectroscopy. Based on the experimental results, a point defect model is proposed, which is supported by density functional theory calculations. At low fluorine concentrations, fluorine substitutes oxygen on a lattice site, while fluorine is located interstitially at high concentrations. The formation of an associated fluorine substitutional–interstitial pair is observed instead of isolated interstitial fluorine.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: ZnO doping and properties · Gas Sensing Nanomaterials and Sensors · Ga2O3 and related materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (41)
Show source-provided references
1. Arefi-Khonsari F, Bauduin N, Donsanti F, Amouroux J (2003) Deposition of transparent conductive tin oxide thin films doped with fluorine by PACVD. Thin Solid Films 427:208–21410.1016/S0040-6090(02)01211-7 ↗
2. Ayyub P, Palkar VR, Chattopadhyay S, Multani M (1995) Effect of crystal size reduction on lattice symmetry and cooperative properties. Phys Rev B 51:6135–613810.1103/PhysRevB.51.6135 ↗
3. Bae JW, Lee SW, Yeom GY (2007) Doped-fluorine on electrical and optical properties of tin oxide films grown by ozone-assisted thermal CVD. J Electrochem Soc 154:D34–D3710.1149/1.2382346 ↗
4. Blöchl PE (1994) Projector augmented-wave method. Phys Rev B 50:17953–1797910.1103/PhysRevB.50.17953 ↗
5. Brehm JU, Winterer M, Hahn H (2006) Synthesis and local structure of doped nanocrystalline zinc oxides. J Appl Phys 100:06431110.1063/1.2349430 ↗
6. Bruneaux J, Cachet H, Fromment M, Messad A (1991) Correlation between structural and electrical-properties of sprayed tin oxide-films with and without fluorine doping. Thin Solid Films 197:129–14210.1016/0040-6090(91)90226-N ↗
7. Canestraro CD, Oliveira MM, Valaski R, da Silva MVS, David DGF, Pepe I, da Silva AF, Roman LS, Persson C (2008) Strong inter-conduction-band absorption in heavily fluorine doped tin oxide. Appl Surf Sci 255:1874–187910.1016/j.apsusc.2008.06.113 ↗
8. Canestraro CD, Roman LS, Persson C (2009) Polarization dependence of the optical response in SnO2 and the effects from heavily F doping. Thin Solid Films 517:6301–630410.1016/j.tsf.2009.02.063 ↗
9. Ceperley DM, Alder B-J (1980) Ground state of the electron gas by a stochastic method. Phys Rev Lett 45:566–56910.1103/PhysRevLett.45.566 ↗
10. Chopra KL, Major S, Pandya DK (1983) Transparent conductors—a status review. Thin Solid Films 102:1–4610.1016/0040-6090(83)90256-0 ↗
11. Dawar AL, Joshi JC (1984) Semiconducting transparent thin films: their properties and applications. J Mater Sci 19:1–2310.1007/BF02403106 ↗
12. Ensling D, Thißen A, Gassenbauer Y, Klein A, Jaegermann W (2005) In situ preparation and analysis of functional oxides. Adv Eng Mater 7:945–94910.1002/adem.200500125 ↗
13. Erhart P, Klein A, Albe K (2005) Phys Rev B 72:08521310.1103/PhysRevB.72.085213 ↗
14. Esteves MC, Gouvêa D, Sumodjo PTA (2004) Effect of fluorine doping on the properties of tin dioxide based powders prepared via Pechini’s method. Appl Surf Sci 229:24–2910.1016/j.apsusc.2004.02.015 ↗
15. Fantini M, Torriani I (1986) The compositional and structural properties of sprayed SnO2:F thin films. Thin Solid Films 138:255–26510.1016/0040-6090(86)90398-6 ↗
16. Ferrón J, Arce R (1991) Anomalous incorporation of fluorine in tin oxide films produced with the pyrosol method. Thin Solid Films 204:405–41110.1016/0040-6090(91)90079-D ↗
17. Gamard A, Jousseaume B, Toupance T, Campet G (1999) New fluorinated stannic compounds as precursors of F-doped SnO2 materials prepared by the sol–gel route. Inorg Chem 38:4671–467910.1021/ic990163s ↗
18. Hall DL, Wang AA, Joy KT, Miller TA, Woolridge MS (2004) Combustion synthesis and characterization of nanocrystalline tin and tin oxide (SnOx, x = 0–2) particles. J Am Ceram Soc 87:2033–204110.1111/j.1151-2916.2004.tb06356.x ↗
19. Han C-H, Han S-D, Gwak J, Khatkar SP (2007) Synthesis of indium tin oxide (ITO) and fluorine-doped tin oxide (FTO) nano-powder by sol–gel combustion hybrid method. Mater Lett 61:1701–170310.1016/j.matlet.2006.07.114 ↗
20. Hartnagel HL, Dawar AL, Jain AK, Jagadish C (1995) Semiconducting transparent thin films. Institute of Physics Publishing, Bristol, UK
21. Jin W, Lee I-K, Kompch A, Dörfler U, Winterer M (2007) Chemical vapor synthesis and characterization of chromium doped zinc oxide nanoparticles. J Eur Ceram Soc 27:4333–433710.1016/j.jeurceramsoc.2007.02.152 ↗
22. Jung D-W, Park D-W (2009) Synthesis of nano-sized antimony-doped tin oxide (ATO) particles using a DC arc plasma jet. Appl Surf Sci 255:5409–541310.1016/j.apsusc.2008.08.054 ↗
23. Kim H, Auyeung RCY, Pique A (2008) Transparent conducting F-doped SnO2 thin films grown by pulsed laser deposition. Thin Solid Films 516:5052–505610.1016/j.tsf.2007.11.079 ↗
24. Kresse G, Furthmüller J (1996a) Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set. Phys Rev B 54:11169–1118610.1103/PhysRevB.54.11169 ↗
25. Kresse G, Furthmüller J (1996b) Efficiency of ab initio total energy calculations for metals and semiconductors using a plane-wave basis set. Comput Mater Sci 6:15–5010.1016/0927-0256(96)00008-0 ↗
26. Kresse G, Joubert D (1999) From ultrasoft pseudopotentials to the projector augmented-wave method. Phys Rev B 59:1758–177510.1103/PhysRevB.59.1758 ↗
27. Leenen MAM, Arning V, Thiem H, Steiger J, Anselm R (2009) Printable electronics: flexibility for the future. Phys Status Solidi A 206:588–59710.1002/pssa.200824428 ↗
28. Martel A, Caballero-Briones F, Fandino J, Castro-Rodriguez R, Bartolo-Perez P, Zapato-Navarro A, Zapato-Torres M, Pena JL (1999) Discharge diagnosis and controlled deposition of SnOx: F films by DC-reactive sputtering from a metallic target. Surf Coat Technol 122:136–14210.1016/S0257-8972(99)00290-X ↗
29. Maruyama T, Akagi H (1996) Fluorine-doped tin dioxide thin films prepared by radio-frequency magnetron sputtering. J Electrochem Soc 143:283–28710.1149/1.1836423 ↗
30. Monkhorst HJ, Pack JD (1976) Special points for Brillouin-zone integrations. Phys Rev B 13:5188–519210.1103/PhysRevB.13.5188 ↗
31. Moulder JF, Stickle WF, Sobol PE, Bomben KD (1995) Handbook of X-ray photoelectron spectroscopy. Physical Electronics Inc., Eden Prairie, MN
32. Patil PS (1999) Versatility of chemical spray pyrolysis technique. Mater Chem Phys 59:185–19810.1016/S0254-0584(99)00049-8 ↗
33. Proscia J, Gordon RG (1992) Properties of fluorite-doped tin oxide-films produced by atmospheric pressure chemical vapour deposition from tetremethyltin, bromotrifluoromethane and oxygen. Thin Solid Films 214:175–18710.1016/0040-6090(92)90767-6 ↗
34. Saxena AK, Thangaraj R, Singh SP, Agnihotri (1985) Characterization of fluorine-doped SnO2 films prepared by chemical vapour deposition. Thin Solid Films 131:121–13010.1016/0040-6090(85)90381-5 ↗
35. Schallehn M, Winterer M, Weirich TE, Keiderling U, Hahn H (2003) In situ preparation of polymer-coated alumina nanopowders by chemical vapor synthesis. Chem Vap Depos 9:40–4410.1002/cvde.200290006 ↗
36. Srdic VV, Winterer M, Hahn H (2000) Sintering behavior of nanocrystalline zirconia doped with alumina prepared by chemical vapor synthesis. J Am Ceram Soc 83:1853–186010.1111/j.1151-2916.2000.tb01481.x ↗
37. Suffner J, Schechner G, Sieger H, Hahn H (2007) In situ coating of silica nanoparticles with acrylate-based polymers. Chem Vap Depos 13:459–46410.1002/cvde.200606522 ↗
38. Szczuko D, Werner D, Oswald S, Behr G, Wetzig K (2001) XPS investigations of surface segregation of doping elements in SnO2. Appl Surf Sci 179:301–30610.1016/S0169-4332(01)00298-7 ↗
39. Thangaraju B (2002) Structural and electrical studies on highly conducting spray deposited fluorine and antimony doped SnO2 thin films from SnCl2 precursor. Thin Solid Films 402:71–7810.1016/S0040-6090(01)01667-4 ↗
40. Winterer M (2002) Nanocrystalline ceramics. Springer, Berlin, Germany10.1007/978-3-662-04976-1 ↗
41. Zhang J, Gao L (2004) Synthesis and characterization of nanocrystalline tin oxide by sol–gel method. J Solid State Chem 177:1425–143010.1016/j.jssc.2003.11.024 ↗