journal article·2006-12

Nanocrystalline ruthenium oxide and ruthenium in sensing applications – an experimental and theoretical study

Anette Salomonsson, Rodrigo M. Petoral, Kajsa Uvdal, Christian Aulin, Per-Olov Käll, Lars Ojamäe, Michael Strand, Mehri Sanati, Anita Lloyd Spetz

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Abstract

In this project, we have explored RuO2 and Ru nanoparticles (∼ ∼10 and ∼ ∼5 nm, respectively, estimated from XRD data) to be used as gate material in field effect sensor devices. The particles were synthesized by wet chemical procedure. The capacitance versus voltage characteristics of the studied capacitance shifts to a lower voltage while exposed to reducing gases. The main objectives are to improve the selectivity of the FET sensors by tailoring the dimension and surface chemistry of the nanoparticles and to improve the high temperature stability. The sensors were characterized using capacitance versus voltage measurements, at different frequencies, 500 Hz to 1 MHz, and temperatures at 100–400°C. The sensor response patterns have been found to depend on operating temperature. X-ray photoelectron spectroscopy (XPS) analyses were performed to investigate the oxidation state due to gas exposure. Quantum-chemical computations suggest that heterolytic dissociative adsorption is favored and preliminary computations regarding water formation from adsorbed hydrogen and oxygen was also performed.
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Research context

OpenAlex topics: Electrochemical Analysis and Applications · Gas Sensing Nanomaterials and Sensors · Copper-based nanomaterials and applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (32)

Show source-provided references
1. Andersson M., Ljung P., Mattson, M., Löfdahl M., Lloyd Spetz A., (2004). Investigations on the possibilities of a MISiCFET sensor system for OBD and combustion control utilizing different catalytic gate materials. Topics Catal. 30/31:36510.1023/B:TOCA.0000029776.18603.74 ↗
2. Åbom A.E., Comini E., Sberveglieri G., Finnegan N., Petrov I., Hultman L., Eriksson M., (2003). Experimental evidence for a dissociation mechanism in NH3 detection with MIS field-effect devices. Sensors Actuators B 89: 1–810.1016/S0925-4005(02)00400-8 ↗
3. Bhaskar S., Dobal P.S., Majumder S.B. and Katiyar R.S. (2001). X-ray photoelectron spectroscopy and micro-Raman analysis of conductive RuO2 thin films. J. Appl. Phys. 89:2987–299210.1063/1.1337588 ↗
4. Böttcher A., Rogozia M., Niehus H., Over H., Ertl G. (1999). Transient experiments on CO2 formation by the CO oxidation reaction over oxygen-rich Ru(0001) surfaces. J. Phys. Chem. B 103:6267–627110.1021/jp990503v ↗
5. Cocke D.L., Abend G., Block J.H., Kruse N., (1985). Oxidation of ruthenium studied by pulsed field desorption mass spectrometry. Langmuir 1:507–50910.1021/la00064a018 ↗
6. Cox P.A., Goodenough J.B., Tavener P.J., Telles D., Egdell R.G. (1986). The electronic structure of Bi2-xGdxRu2O7 and RuO2: a study by electron spectroscopy. J. Solid State Chem. 62:360–37010.1016/0022-4596(86)90251-3 ↗
7. Eriksson M., Salomonsson A., Lundström I., Briand D., Åbom A.E., (2005). The influence of the insulator surface properties on the hydrogen response of field-effect gas sensors. J. Appl. Phys. 98:034903-1–034903-610.1063/1.1994941 ↗
8. Fogelberg J., Lundström I., Petersson L.-G., (1987). Ammonia dissociation on oxygen covered palladium studied with a hydrogen sensitive Pd-MOS device. Phys. Scripta 35:702–70510.1088/0031-8949/35/5/017 ↗
9. Lembo A., Fuso F., Arimondo E., Ciofi C., Pennelli G., Curro G.M., Neri F. and Allegrini M., (1997). Pulsed laser deposition and characterization of conductive Ruo2 thin films. J. Mater. Res. 12:1433--143610.1557/JMR.1997.0195 ↗
10. Kim K.S. and Winograd N.J. (1974). X-ray photoelectron spectroscopic studies of ruthenium-oxygen surfaces. J. Catal. 35:66–7210.1016/0021-9517(74)90184-5 ↗
11. Kolkamov A., Zhang Y., Cheng G., Moskovits M., (2003). Detection of CO and O2 using tin oxide nanowire sensors. Adv. Mater. 15(12):997–100010.1002/adma.200304889 ↗
12. Lloyd Spetz A., Savage S., (2003). Advances in FET chemical gas sensors. In: Choyke W.J., Matsunami H., Pensl G., (eds). Recent Major Advances in SiC. Springer, Berlin, pp. 879–906
13. Löfdahl M., Utaiwasin C., Carlsson A., Lundström I., Eriksson M., (2001). Gas response dependence on gate metal morphology of field-effect devices. Sensors Actuators B 80:183–19210.1016/S0925-4005(01)00886-3 ↗
14. Löfdahl M., Eriksson M., Johansson M., Lundström I., (2002). Difference in hydrogen sensitivity between Pt and Pd field-effect devices. J. Appl. Phys. 91:4275–428010.1063/1.1448874 ↗
15. Málek J., Watanabe A., Mitsuhashi T., (1996). Crystallization kinetics of amorphous RuO2. Thermochim. Acta 282/283:131–14210.1016/0040-6031(96)02887-0 ↗
16. Milman V., Winkler B., White J.A., Pickard C.J., Payne M.C., Akhmatskaya E.V., Nobes R.H., (2000). Electronic structure, properties and phase stability of inorganic crystals: A pseudopotential plane-wave study. Int. J. Quantum Chem. 77(5): 895--91010.1002/(SICI)1097-461X(2000)77:5<895::AID-QUA10>3.0.CO;2-C ↗
17. Ojamäe, L., C. Aulin, H. Pedersen & P.-O. Käll, 2005. IR and quantum-chemical studies of carboxylic acid and glycine adsorption on rutile TiO2 nanoparticles. J. Colloid Interface Sci. (in press)10.1016/j.jcis.2005.08.037 ↗
18. Over, H., 2002. Ruthenium dioxide, a fascinating material for atomic scale surface chemistry. Appl. Phys. A 75, 37–4410.1007/s003390101053 ↗
19. Over H., Muhler M., (2003). Catalytic CO oxidation over ruthenium-bridging the pressure gap. Prog. Surf. Sci. 72:3–1710.1016/S0079-6816(03)00011-X ↗
20. Persson P., Lunell S., and Ojamäe L., (2002). Quantum chemical prediction of the adsorption conformations and dynamics at HCOOH-covered ZnO(100) surfaces. Int. J. Quantum Chem. 89:172–18010.1002/qua.10316 ↗
21. Peden C.H.F., Goodman D.W., (1986). Kinetics of CO oxidation over Ru(0001). J. Phys. Chem. 90:1360–136510.1021/j100398a031 ↗
22. Perdew J. P., Chevary J. A., Vosko S. H., Jackson K. A., Pederson M. R., Singh D. J., Fiolhais C., (1992). Phys. Rev. B 46(11):6671–668710.1103/PhysRevB.46.6671 ↗
23. Rochefort D., Dabo P., Guay D. and Sherwood P.M.A. (2003), XPS investigations of thermally prepared RuO2 electrodes in reductive conditions. Electrochim. Acta 48:4245–425210.1016/S0013-4686(03)00611-X ↗
24. Roy S., Jacob C., Lang C., Basu S., (2003). Studies on Ru/3C-SiC Schottky junctions for high temperature hydrogen sensors. J. Electrochem. Soc. 150(6):H135–H13910.1149/1.1573202 ↗
25. Salomonsson A., Roy S., Aulin C., Cerdà J., Käll P.-O., Ojamäe L., Strand M., Sanati M., Lloyd Spetz A., (2005). Nanoparticles for long-term stable, more selective MISiCFEt gas sensors. Sensors Actuators B 107/2:831–83810.1016/j.snb.2004.12.024 ↗
26. Vanderbilt, D., 1990. Soft self-consistent pseudopotentials in a generalized eigenvalue formalism. Phys. Rev. B 41(11), 7892–7895.10.1103/PhysRevB.41.7892 ↗
27. Vuong D.D., Sakai G., Shimanoe K., Yamazoe N., (2005). Hydrogen sulfide gas sensing properties of thin films derived from SnO2 sols different in grain size. Sensors Actuators B 105:437–44210.1016/j.snb.2004.06.034 ↗
28. Wallin M., Grönbeck H., Lloyd Spetz A., Skoglundh M., (2004). Vibrational study of ammonia adsorption on Pt/SiO2. Appl. Surf. Sci. 235:48710.1016/j.apsusc.2004.03.225 ↗
29. Wallin M., Grönbeck H., Lloyd Spetz A., Eriksson M., Skoglundh M., (2005). Vibrational analysis of H2 and D2 adsorption on Pt/SiO2. J. Phys. Chem. B 109:9581–958810.1021/jp044759z ↗
30. Wang J., Fan C.Y., Sun Q., Reuter K., Jacobi K., Scheffler M., Ertl G., (2003). Surface coordination chemistry: dihydrogen versus hydride complexes on RuO2(110). Angew. Chem. Int. Ed. 42(19):2151–215410.1002/anie.200250659 ↗
31. Wendt S., Seitsonen A.P., Kim Y.D., Knapp M., Idriss H., Over H. (2002). Complex redox chemistry on the RuO2(110) surface: experiment and theory. Surf. Sci. 505:137–15210.1016/S0039-6028(02)01147-0 ↗
32. White J.A., Bird D.M., (1994). Implementation of gradient-corrected exchange-correlation potentials in Car-Parrinello total-energy calculations. Phys. Rev. B 50:4954–495710.1103/PhysRevB.50.4954 ↗