Ni-catalysed WO3 nanostructures grown by electron beam rapid thermal annealing for NO2 gas sensing

Ni-catalysed WO3 (Ni–WO3) nanowires and nanosheets were grown on Si (100) substrates using electron beam evaporation followed by electron beam-assisted rapid thermal annealing process. Gas-sensing measurements were performed for various concentrations of NO2 in dry air at a temperature range of 50–400 °C. Nanowires and nanosheets show optimum sensor response of 229 and 197 at operating temperatures of 200 and 250 °C, respectively, for 100 ppm of NO2 exposure. Nanowires demonstrated a rapid response time of 66 s, but a slow recovery time of 204 s owing to poor rate of desorption of the adsorbed NO2 gas molecules from the internal porous structure of nanowires. In contrast, the recovery time for nanosheet was 126 s due to higher desorption rate of the adhered NO2 molecules associated with low surface area and less porous structure of nanosheet. The gas-sensing mechanism of WO3 nanostructure is discussed briefly.