Particle atomic layer deposition
Source abstract
Abstract
The functionalization of fine primary particles by atomic layer deposition (particle ALD) provides for nearly perfect nanothick films to be deposited conformally on both external and internal particle surfaces, including nanoparticle surfaces. Film thickness is easily controlled from several angstroms to nanometers by the number of self-limiting surface reactions that are carried out sequentially. Films can be continuous or semi-continuous. This review starts with a short early history of particle ALD. The discussion includes agitated reactor processing, both atomic and molecular layer deposition (MLD), coating of both inorganic and polymer particles, nanoparticles, and nanotubes. A number of applications are presented, and a path forward, including likely near-term commercial products, is given.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Semiconductor materials and devices · Electronic and Structural Properties of Oxides · Catalytic Processes in Materials Science
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (100+)
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1. Allen NS, Edge M, He JH, Thompson F (1992) Electrophotographic and microwave photodielectric studies. 1. Effect of various transition-metal dopants on titanium-dioxide pigments in the solid-state. Dyes Pigments 20(3):211–22610.1016/0143-7208(92)80046-P ↗
2. Arifin D, Aston VJ, Liang XH, McDaniel AH, Weimer AW (2012) CoFe2O4 on a porous Al2O3 nanostructure for solar thermochemical CO2 splitting. Energy Environ Sci 5(11):9438–944310.1039/c2ee22090c ↗
3. Beard MC, Knutsen KP, Yu PR, Luther JM, Song Q, Metzger WK, Ellingson RJ, Nozik AJ (2007) Multiple exciton generation in colloidal silicon nanocrystals. Nano Lett 7(8):2506–251210.1021/nl071486l ↗
4. Bhattacharya P, Ghosh S, Stiff-Roberts AD (2004) Quantum dot opto-electronic devices. Annu Rev Mater Res 34:1–4010.1146/annurev.matsci.34.040203.111535 ↗
5. Boniecki M, Natanzon Y, Łodziana Z (2010) Effect of cation doping on lattice and grain boundary diffusion in superplastic yttria-stabilized tetragonal zirconia. J Eur Ceram Soc 30(3):657–66810.1016/j.jeurceramsoc.2009.09.009 ↗
6. Brus LE (1983) A simple-model for the ionization-potential, electron-affinity, and aqueous redox potentials of small semiconductor crystallites. J Chem Phys 79(11):5566–557110.1063/1.445676 ↗
7. Cavanagh AS, Wilson CA, Weimer AW, George SM (2009) Atomic layer deposition on gram quantities of multi-walled carbon nanotubes. Nanotechnology 20(25):25560210.1088/0957-4484/20/25/255602 ↗
8. Chatham H (1996) Oxygen diffusion barrier properties of transparent oxide coatings on polymeric substrates. Surf Coat Technol 78(1–3):1–910.1016/0257-8972(95)02420-4 ↗
9. Choi SR, Bansal NP (2005) Mechanical behavior of zirconia/alumina composites. Ceram Int 31(1):39–4610.1016/j.ceramint.2004.03.032 ↗
10. Chueh WC, Falter C, Abbott M, Scipio D, Furler P, Haile SM, Steinfeld A (2010) High-flux solar-driven thermochemical dissociation of CO2 and H2O using nonstoichiometric ceria. Science 330(6012):1797–180110.1126/science.1197834 ↗
11. Czok GS, Werther J (2006) Liquid spray vs. gaseous precursor injection - Its influence on the performance of particle coating by CVD in the fluidized bed. Powder Technol 162(2):100–11010.1016/j.powtec.2005.12.011 ↗
12. Dameron AA, Seghete D, Burton BB, Davidson SD, Cavanagh AS, Bertrand JA, George SM (2008) Molecular layer deposition of alucone polymer films using trimethylaluminum and ethylene glycol. Chem Mater 20(10):3315–332610.1021/cm7032977 ↗
13. Devine CK, Oldham CJ, Jur JS, Gong B, Parsons GN (2011) Fiber containment for improved laboratory handling and uniform nanocoating of milligram quantities of carbon nanotubes by atomic layer deposition. Langmuir 27(23):14497–1450710.1021/la202677u ↗
14. Ebbesen SD, Mogensen M (2009) Electrolysis of carbon dioxide in solid oxide electrolysis cells. J Power Sources 193(1):349–35810.1016/j.jpowsour.2009.02.093 ↗
15. Erlat AG, Spontak RJ, Clarke RP, Robinson TC, Haaland PD, Tropsha Y, Harvey NG, Vogler EA (1999) SiOx gas barrier coatings on polymer substrates: morphology and gas transport considerations. J Phys Chem B 103(29):6047–605510.1021/jp990737e ↗
16. Feighery AJ, Irvine JTS (1999) Effect of alumina additions upon electrical properties of 8 mol.% yttria-stabilised zirconia. Solid State Ionics 121(1):209–21610.1016/S0167-2738(99)00015-6 ↗
17. Feng H, Lu JL, Stair PC, Elam JW (2011) Alumina over-coating on Pd nanoparticle catalysts by atomic layer deposition: enhanced stability and reactivity. Catal Lett 141(4):512–51710.1007/s10562-011-0548-8 ↗
18. Ferguson JD, Weimer AW, George SM (2000a) Atomic layer deposition of SiO2 films on BN particles using sequential surface reactions. Chem Mater 12(11):3472–348010.1021/cm000313t ↗
19. Ferguson JD, Weimer AW, George SM (2000b) Atomic layer deposition of ultrathin and conformal Al2O3 films on BN particles. Thin Solid Films 371(1–2):95–10410.1016/S0040-6090(00)00973-1 ↗
20. Ferguson JD, Weimer AW, George SM (2002) Atomic layer deposition of boron nitride using sequential exposures of BCl3 and NH3. Thin Solid Films 413(1–2):16–2510.1016/S0040-6090(02)00431-5 ↗
21. Ferguson JD, Weimer AW, George SM (2004) Atomic layer deposition of Al2O3 films on polyethylene particles. Chem Mater 16(26):5602–560910.1021/cm040008y ↗
22. Ferguson JD, Buechler KJ, Weimer AW, George SM (2005) SnO2 atomic layer deposition on ZrO2 and Al nanoparticles: pathway to enhanced thermite materials. Powder Technol 156(2–3):154–16310.1016/j.powtec.2005.04.009 ↗
23. George SM (2010) Atomic layer deposition: an overview. Chem Rev 110(1):111–13110.1021/cr900056b ↗
24. George SM, Ott AW, Klaus JW (1996) Surface chemistry for atomic layer growth. J Phys Chem 100(31):13121–1313110.1021/jp9536763 ↗
25. George SM, Ferguson JD, Klaus JW (2000) Atomic layer deposition of thin films using sequential surface reactions. In: Wadley HNG, Gilmer GH, Barker WG (eds) New methods, mechanisms and models of vapor deposition, vol 616, pp 93–101
26. George SM, Ferguson JD, Weimer AW (2003) Atomic layer controlled deposition on particle surfaces. (U.S. Patent 6,613,383)
27. George SM, Ferguson JD, Weimer AW, Wank JR (2004) Insulating and functionalizing fine metal-containing particles with conformal ultra-thin films. (U.S. Patent 6,713,177)
28. George SM, Ferguson JD, Weimer AW, Wank JR (2005) Nanocoated primary particles and method for their manufacture. (US. Patent 6,913,827)
29. German R (1985) Liquid phase sintering. Springer Science + Business, New York10.1007/978-1-4899-3599-1 ↗
30. Gong B, Parsons GN (2012) Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition. J Mater Chem 22(31):15672–1568210.1039/c2jm32343e ↗
31. Gould TD, Izar A, Weimer AW, Falconer JL, Medlin JW (2014) Stabilizing Ni catalysts by molecular layer deposition for harsh, dry reforming conditions. ACS Catal 4(8):2714–271710.1021/cs500809w ↗
32. Grillo F, Kreutzer MT, van Ommen JR (2015) Modeling the precursor utilization in atomic layer deposition on nanostructured materials in fluidized bed reactors. Chem Eng J 268:384–39810.1016/j.cej.2015.01.067 ↗
33. Hakim L, Blackson J, George S, Weimer A (2005a) Nanocoating individual silica nanoparticles by atomic layer deposition in a fluidized bed reactor. Chem Vap Depos 11(10):420–42510.1002/cvde.200506392 ↗
34. Hakim LF, George SM, Weimer AW (2005b) Conformal nanocoating of zirconia nanoparticles by atomic layer deposition in a fluidized bed reactor. Nanotechnology 16(7):S375–S38110.1088/0957-4484/16/7/010 ↗
35. Hakim LF, Portman JL, Casper MD, Weimer AW (2005c) Aggregation behavior of nanoparticles in fluidized beds. Powder Technol 160(3):149–16010.1016/j.powtec.2005.08.019 ↗
36. Hakim LF, McCormick JA, Zhan GD, Weimer AW, Li P, George SM (2006) Surface modification of titania nanoparticles using ultrathin ceramic films. J Am Ceram Soc 89(10):3070–307510.1111/j.1551-2916.2006.01216.x ↗
37. Hakim LF, Blackson JH, Weimer AW (2007a) Modification of interparticle forces for nanoparticles using atomic layer deposition. Chem Eng Sci 62(22):6199–621110.1016/j.ces.2007.07.013 ↗
38. Hakim LF, King DM, Zhou Y, Gump CJ, George SM, Weimer AW (2007b) Nanoparticle coating for advanced optical, mechanical and rheological properties. Adv Funct Mater 17(16):3175–318110.1002/adfm.200600877 ↗
39. Hakim LF, Vaughn CL, Dunsheath HJ, Carney CS, Liang X, Li P, Weimer AW (2007c) Synthesis of oxidation-resistant metal nanoparticles via atomic layer deposition. Nanotechnology 18(34):34560310.1088/0957-4484/18/34/345603 ↗
40. Hausmann D, Becker J, Wang SL, Gordon RG (2002) Rapid vapor deposition of highly conformal silica nanolaminates. Science 298(5592):402–40610.1126/science.1073552 ↗
41. Herrmann CF, Fabreguette FH, Finch DS, Geiss R, George SM (2005) Multilayer and functional coatings on carbon nanotubes using atomic layer deposition. Appl Phys Lett 87(12):12311010.1063/1.2053358 ↗
42. Hodgson SNB, Cawley J, Clubley M (1999) The role of Al2O3 impurities on the microstructure and properties of Y-TZP. J Mater Process Technol 92(Supplement C):85–9010.1016/S0924-0136(99)00164-8 ↗
43. Hoskins AL, Coffey AH, Musgrave CB, Weimer AW (2018) Nanostructured mullite steam oxidation resistant coatings for silicon carbide deposited via atomic layer deposition. J Am Ceram Soc 101(6):2493–250510.1111/jace.15408 ↗
44. Hui S, Roller J, Yick S, Zhang X, Decès-Petit C, Xie Y, Maric R, Ghosh D (2007) A brief review of the ionic conductivity enhancement for selected oxide electrolytes. J Power Sources 172(2):493–50210.1016/j.jpowsour.2007.07.071 ↗
45. Jung YS, Cavanagh AS, Dillon AC, Groner MD, George SM, Lee SH (2010) Enhanced stability of LiCoO2 cathodes in lithium-ion batteries using surface modification by atomic layer deposition. J Electrochem Soc 157(1):A75–A8110.1149/1.3258274 ↗
46. Kemp TJ, McIntyre RA (2006) Transition metal-doped titanium(IV) dioxide: characterisation and influence on photodegradation of poly(vinyl chloride). Polym Degrad Stab 91(1):165–19410.1016/j.polymdegradstab.2005.04.033 ↗
47. Kilbury OJ, Barrett KS, Fu XW, Yin J, Dinair DS, Gump CJ, Weimer AW, King DM (2012) Atomic layer deposition of solid lubricating coatings on particles. Powder Technol 221:26–3510.1016/j.powtec.2011.12.021 ↗
48. Kim IS, Li ZY, Zheng J, Platero-Prats AE, Mavrandonakis A, Pellizzeri S, Ferrandon M, Vjunov A, Gallington LC, Webber TE, Vermeulen NA, Penn RL, Getman RB, Cramer CJ, Chapman KW, Camaioni DM, Fulton JL, Lercher JA, Farha OK, Hupp JT, Martinson ABF (2018) Sinter-resistant platinum catalyst supported by metal-organic framework. Angew Chem Int Ed 57(4):909–91310.1002/anie.201708092 ↗
49. King DM, Spencer JA, Liang X, Hakim LF, Weimer AW (2007) Atomic layer deposition on particles using a fluidized bed reactor with in situ mass spectrometry. Surf Coat Technol 201(22–23):9163–917110.1016/j.surfcoat.2007.05.002 ↗
50. King DM, Du XH, Cavanagh AS, Weimer A (2008a) Quantum confinement in amorphous TiO(2) films studied via atomic layer deposition. Nanotechnology 19(44):44540110.1088/0957-4484/19/44/445401 ↗
51. King DM, Liang XH, Burton BB, Akhtar MK, Weimer AW (2008b) Passivation of pigment-grade TiO(2) particles by nanothick atomic layer deposited SiO(2) films. Nanotechnology 19(25):25560410.1088/0957-4484/19/25/255604 ↗
52. King DM, Liang XH, Carney CS, Hakim LF, Li P, Weimer AW (2008c) Atomic layer deposition of UV-absorbing ZnO films on SiO2 and TiO2 nanoparticles using a fluidized bed reactor. Adv Funct Mater 18(4):607–61510.1002/adfm.200700705 ↗
53. King DM, Liang XH, Li P, Weimer AW (2008d) Low-temperature atomic layer deposition of ZnO films on particles in a fluidized bed reactor. Thin Solid Films 516(23):8517–852310.1016/j.tsf.2008.05.026 ↗
54. King DM, Liang XH, Zhou Y, Carney CS, Hakim LF, Li P, Weimer AW (2008e) Atomic layer deposition of TiO2 films on particles in a fluidized bed reactor. Powder Technol 183(3):356–36310.1016/j.powtec.2008.01.025 ↗
55. King DM, Johnson SI, Li JH, Du XH, Liang XH, Weimer AW (2009a) Atomic layer deposition of quantum-confined ZnO nanostructures. Nanotechnology 20(19):19540110.1088/0957-4484/20/19/195401 ↗
56. King DM, Li JH, Liang XH, Johnson SI, Channel MM, Weimer AW (2009b) Crystal phase evolution in quantum confined ZnO domains on particles via atomic layer deposition. Cryst Growth Des 9(6):2828–283410.1021/cg9000939 ↗
57. King DM, Zhou Y, Hakim LF, Liang XH, Li P, Weimer AW (2009c) In situ synthesis of TiO2-functionalized metal nanoparticles. Ind Eng Chem Res 48(1):352–36010.1021/ie800196h ↗
58. Kodama T, Gokon N (2007) Thermochemical cycles for high-temperature solar hydrogen production. Chem Rev 107(10):4048–407710.1021/cr050188a ↗
59. Kubono A, Okui N, Tanaka K, Umemoto S, Sakai T (1991) Highly oriented polyamide thin-films prepared by vapor-deposition polymerization. Thin Solid Films 199(2):385–39310.1016/0040-6090(91)90021-O ↗
60. Lee JH, Mori T, Li JG, Ikegami T, Komatsu M, Haneda H (2000) Improvement of grain-boundary conductivity of 8 mol % yttria-stabilized zirconia by precursor scavenging of siliceous phase. J Electrochem Soc 147(7):2822–282910.1149/1.1393612 ↗
61. Lei L, Bai Y, Liu J (2014) Ni-based anode-supported Al2O3-doped-Y2O3-stabilized ZrO2 thin electrolyte solid oxide fuel cells with Y2O3-stabilized ZrO2 buffer layer. J Power Sources 248:1312–131910.1016/j.jpowsour.2013.10.023 ↗
62. Liang XH, Weimer AW (2010) Photoactivity passivation of TiO2 nanoparticles using molecular layer deposited (MLD) polymer films. J Nanopart Res 12(1):135–14210.1007/s11051-009-9587-0 ↗
63. Liang S, George M, Weimer AW, Li N-H, Blackson JH, Harris JD, Li P (2007a) Synthesis of a novel porous polymer/ceramic composite material by low-temperature atomic layer deposition. Chem Mater 19(22):5388–539410.1021/cm071431k ↗
64. Liang XH, Hakim LF, Zhan GD, McCormick JA, George SM, Weimer AW, Spencer JA, Buechler KJ, Blackson J, Wood CJ, Dorgan JR (2007b) Novel processing to produce polymer/ceramic nanocomposites by atomic layer deposition. J Am Ceram Soc 90(1):57–6310.1111/j.1551-2916.2006.01359.x ↗
65. Liang X, King DM, Li P, George SM, Weimer AW (2009a) Nanocoating hybrid polymer films on large quantities of cohesive nanoparticles by molecular layer deposition. AICHE J 55(4):1030–103910.1002/aic.11757 ↗
66. Liang XH, Yu M, Li JH, Jiang YB, Weimer AW (2009b) Ultra-thin microporous-mesoporous metal oxide films prepared by molecular layer deposition (MLD). Chem Commun 46:7140–714210.1039/b911888h ↗
67. Liang XH, Barrett KS, Jiang YB, Weimer AW (2010) Rapid silica atomic layer deposition on large quantities of cohesive nanoparticles. ACS Appl Mater Interfaces 2(8):2248–225310.1021/am100279v ↗
68. Liang XH, Li JH, Yu M, McMurray CN, Falconer JL, Weimer AW (2011) Stabilization of supported metal nanoparticles using an ultrathin porous shell. ACS Catal 1(10):1162–116510.1021/cs200257p ↗
69. Liang XH, Jiang YB, Weimer AW (2012a) Nanocoating zinc alkoxide (zincone) hybrid polymer films on particles using a fluidized bed reactor. J Vac Sci Technol A 30(1):01A10810.1116/1.3644952 ↗
70. Liang XH, Li NH, Weimer AW (2012b) Template-directed synthesis of porous alumina particles with precise wall thickness control via atomic layer deposition. Microporous Mesoporous Mater 149(1):106–11010.1016/j.micromeso.2011.08.025 ↗
71. Liang XH, Evanko BW, Izar A, King DM, Jiang YB, Weimer AW (2013) Ultrathin highly porous alumina films prepared by alucone ABC molecular layer deposition (MLD). Microporous Mesoporous Mater 168:178–18210.1016/j.micromeso.2012.09.035 ↗
72. Lichty P, Liang XH, Muhich C, Evanko B, Bingham C, Weimer AW (2012) Atomic layer deposited thin film metal oxides for fuel production in a solar cavity reactor. Int J Hydrog Energy 37(22):16888–1689410.1016/j.ijhydene.2012.08.004 ↗
73. Lu JL, Fu BS, Kung MC, Xiao GM, Elam JW, Kung HH, Stair PC (2012) Coking- and sintering-resistant palladium catalysts achieved through atomic layer deposition. Science 335(6073):1205–120810.1126/science.1212906 ↗
74. Matsui K, Yamakawa T, Uehara M, Enomoto N, Hojo J (2008a) Mechanism of alumina-enhanced sintering of fine zirconia powder: influence of alumina concentration on the initial stage sintering. J Am Ceram Soc 91(6):1888–189710.1111/j.1551-2916.2008.02350.x ↗
75. Matsui K, Yamakawa T, Uehara M, Enomoto N, Hojo J (2008b) Sintering mechanism of fine zirconia powders with alumina added by powder mixing and chemical processes. J Mater Sci 43(8):2745–275310.1007/s10853-008-2493-5 ↗
76. McCormick JA, Cloutier BL, Weimer AW, George SM (2007a) Rotary reactor for atomic layer deposition on large quantities of nanoparticles. J Vac Sci Technol A 25(1):67–7410.1116/1.2393299 ↗
77. McCormick JA, Rice KP, Paul DF, Weimer AW, George SM (2007b) Analysis of Al2O3 atomic layer deposition on ZrO2 nanoparticles in a rotary reactor. Chem Vap Depos 13(9):491–49810.1002/cvde.200606563 ↗
78. Meng XB (2017a) Atomic-scale surface modifications and novel electrode designs for high-performance sodium-ion batteries via atomic layer deposition. J Mater Chem A 5(21):10127–1014910.1039/C7TA02742G ↗
79. Meng XB (2017b) An overview of molecular layer deposition for organic and organic-inorganic hybrid materials: mechanisms, growth characteristics, and promising applications. J Mater Chem A 5(35):18326–1837810.1039/C7TA04449F ↗
80. Meng XB, Yang XQ, Sun XL (2012) Emerging applications of atomic layer deposition for lithium-ion battery studies. Adv Mater 24(27):3589–361510.1002/adma.201200397 ↗
81. Mori M, Yoshikawa M, Itoh H, Abe T (1994) Effect of alumina on sintering behavior and electrical conductivity of high-purity yttria-stabilized zirconia. J Am Ceram Soc 77(8):2217–221910.1111/j.1151-2916.1994.tb07124.x ↗
82. Nozik AJ (2008) Multiple exciton generation in semiconductor quantum dots. Chem Phys Lett 457(1–3):3–1110.1016/j.cplett.2008.03.094 ↗
83. O’Neill BJ, Jackson DHK, Lee J, Canlas C, Stair PC, Marshall CL, Elam JW, Kuech TF, Dumesic JA, Huber GW (2015) Catalyst design with atomic layer deposition. ACS Catal 5(3):1804–182510.1021/cs501862h ↗
84. O’Toole R, Bartel C, Kodas M, Horell A, Ricote S, Sullivan N, Gump C, Musgrave C, Weimer A (2018) Particle atomic layer deposition of alumina for sintreing yttria-stabilized cubic zirconia. J Am Ceram Soc. https://doi.org/10.1111/jace.1609110.1111/jace.16091 ↗
85. Ott AW, Klaus JW, Johnson JM, George SM (1997a) Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry. Thin Solid Films 292(1–2):135–14410.1016/S0040-6090(96)08934-1 ↗
86. Ott AW, Klaus JW, Johnson JM, George SM, McCarley KC, Way JD (1997b) Modification of porous alumina membranes using Al2O3 atomic layer controlled deposition. Chem Mater 9(3):707–71410.1021/cm960377x ↗
87. Patel RL, Xie H, Park J, Asl HY, Choudhury A, Liang XH (2016a) Significant capacity and cycle-life improvement of lithium-ion batteries through ultrathin conductive film stabilized cathode particles. Adv Mater Interfaces 3(13):150004610.1002/admi.201600525 ↗
88. Patel RL, Jiang YB, Choudhury A, Liang XH (2016b) Employing synergetic effect of doping and thin film coating to boost the performance of lithium-ion battery cathode particles. Sci Rep 6:2529310.1038/srep25293 ↗
89. Phaahlamohlaka TN, Dlamini MW, Mogodi MW, Kumi DO, Jewell LL, Billing DG, Coville NJ (2018) A sinter resistant Co Fischer-Tropsch catalyst promoted with Ru and supported on titania encapsulated by mesoporous silica. Appl Catal A Gen 552:129–13710.1016/j.apcata.2017.12.015 ↗
90. Powell QH, Fotou GP, Kodas TT, Anderson BM, Guo YX (1997) Gas-phase coating of TiO2 with SiO2 in a continuous flow hot-wall aerosol reactor. J Mater Res 12(2):552–55910.1557/JMR.1997.0079 ↗
91. Puurunen RL (2003) Growth per cycle in atomic layer deposition: a theoretical model. Chem Vap Depos 9(5):249–25710.1002/cvde.200306265 ↗
92. Puurunen RL (2005) Surface chemistry of atomic layer deposition: a case study for the trimethylaluminum/water process. J Appl Phys 97(12):12130110.1063/1.1940727 ↗
93. Sanchez-Gonzalez J, Ruiz-Garcia J, Galvez-Ruiz MJ (2003) Langmuir-Blodgett films of biopolymers: a method to obtain protein multilayers. J Colloid Interface Sci 267(2):286–29310.1016/S0021-9797(03)00754-9 ↗
94. Scheffe JR, Frances A, King DM, Liang XH, Branch BA, Cavanagh AS, George SM, Weimer AW (2009) Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen. Thin Solid Films 517(6):1874–187910.1016/j.tsf.2008.09.086 ↗
95. Singhal SC (2000) Advances in solid oxide fuel cell technology. Solid State Ionics 135(1):305–31310.1016/S0167-2738(00)00452-5 ↗
96. Snyder MQ, Trebukhova,SA, Ravdel B, Wheeler MC, DiCarlo J, Tripp, CP, DeSisto WJ (2007) Synthesis and characterization of atomic layer deposited titanium nitride thin films on lithium titanate spinel powder as a lithium-ion battery anode. Journal of Power Sources 165:379–38510.1016/j.jpowsour.2006.12.015 ↗
97. Song X, Lu J, Zhang T, Ma J (2011) Two-stage master sintering curve approach to sintering kinetics of undoped and Al2O3-doped 8 mol% yttria-stabilized cubic zirconia. J Am Ceram Soc 94(4):1053–105910.1111/j.1551-2916.2010.04199.x ↗
98. Stetter JR, Penrose WR, Yao S (2003) Sensors, chemical sensors, electrochemical sensors, and ECS. J Electrochem Soc 150(2):S11–S1610.1149/1.1539051 ↗
99. Suárez G, Sakka Y (2010) Effect of alumina addition on initial sintering of cubic ZrO2 (8YSZ). Ceram Int 36(3):879–88510.1016/j.ceramint.2009.11.003 ↗
100. Sun Q, Lau KC, Geng D, Meng X (2018) Atomic and molecular layer deposition for superior lithium-sulfur batteries: strategies, performance, and mechanisms. Batteries and Supercaps 1:41–6810.1002/batt.201800024 ↗