A Travelling-Wave Reasonator for Heating Low-Resistivity Silicon Ribbons and Wafers
Source abstract
Abstract
A traveling-wave resonator and applicators for heating low-resistivity silicon ribbons and wafers have been studied. The performance of the microwave circuit agrees with the theoretical predictions. An applicator for 150 mm (six-inch) diameter wafers is described. Theoretical estimates of temperature distributions and some measured temperature distributions are included.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Silicon and Solar Cell Technologies · Advancements in Semiconductor Devices and Circuit Design · Silicon Carbide Semiconductor Technologies
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References (4)
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1. Jaouen, H. 1984. Principes et Realisations dun Banc de Recuit en. Hvrterfrequence de Materiaux Semiconducteurs. Thesis presented at the Institut National Polytechnique de Grenoble for the degree Docteur Ingenieur. 4 July 1984.
2. Jaouen, H., Chenevier, P., Karnarinos, G., and Pananakakis, G. 1984. Recuit pulse de semiconducteurs par hyperfrequences.
3. Sirkis, M.D. 1987. Means and methods for heating semiconductor ribbons and wafers with microwaves. U.S. Patent No. 4,714,810. Issued December 22, 1987.
4. Svet, D.Y. 1965. Thermal • adiation: Metals. Semiconductors. Ceramics, Partly Transparent Bodies. and Films Consultants Bureau, New York, NY.10.1007/978-1-4899-4959-2 ↗