HiFiMO: a high-resolution flexible mask optimization framework with diffusion model
Bibliographic record
Abstract
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Research context
OpenAlex topics: Advancements in Photolithography Techniques · Injection Molding Process and Properties · Manufacturing Process and Optimization
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Affiliations
Fudan University, College of Future Information Technology, Shanghai, China
ShanghaiTech University, School of Information Science and Technology, Shanghai, China
References
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