Evaluation of the change in photoresist sidewall roughness due to electron beam-induced shrinkage using atomic force microscopy

BackgroundScanning electron microscopy (SEM) is commonly employed for line edge roughness (LER) measurements; however, achieving high-precision LER measurement of photoresists is difficult through this approach because electron beam (EB) exposure causes shrinkage of materials. Moreover, the differences in the 3D sidewall shape before and after shrinkage have not been investigated in detail.AimEvaluation of the impact of photoresist shrinkage induced by EB exposure on the sidewall roughness of a pattern.ApproachThe shrinkage was observed by measuring a photoresist pattern before and after EB exposure using atomic force microscopy with a tip-tilting technique (tilting-AFM).ResultsEB exposure smoothed the surface roughness, rounded the top corners, and reduced the pattern height. Roughness parameters evaluated via LER analysis showed that with shrinkage, the standard deviation (σ) and roughness exponent (α) decreased, while the correlation length (ξ) increased.ConclusionsThe results show that SEM-based LER measurements may lead to underestimation of σ and α, and the overestimation of ξ because of the effect of EB-induced shrinkage. Overall, we establish a tilting-AFM technique to evaluate the 3D shape of photoresist patterns without EB damage and with high resolution and low noise.