journal article·2025-01-20

A mechanical model for direct wafer bonding by strain energy under normal pressure

Shirong Cai, Yunyun Sun, Shijing Wu, Henry Tan

Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: 3D IC and TSV technologies · Electronic Packaging and Soldering Technologies · Advanced Surface Polishing Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (22)

Show source-provided references
1. Chen · Nature Comm. · 2018 · 9 · 154210.1038/s41467-018-03930-5 ↗
2. Christiansen · Proc. IEEE · 2006 · 94 · 206010.1109/JPROC.2006.886026 ↗
3. Hong · Appl. Surf. Sci. · 2017 · 420 · 48310.1016/j.apsusc.2017.05.128 ↗
4. Huang · Results Phys. · 2021 · 31 · 10507010.1016/j.rinp.2021.105070 ↗
5. Ip · ECS Trans. · 2020 · 98 · 4710.1149/09804.0047ecst ↗
6. Jeon · Mater. Sci. Semicond. Proc. · 2021 · 128 · 10575510.1016/j.mssp.2021.105755 ↗
7. Jiang · Int. J. Solids Struct. · 2023 · 267 · 11216410.1016/j.ijsolstr.2023.112164 ↗
8. Kubair · J. Phys. D Appl. Phys. · 2007 · 40 · 307010.1088/0022-3727/40/10/010 ↗
9. Lei · Thin Solid Films · 2014 · 562 · 37710.1016/j.tsf.2014.04.069 ↗
10. Liu · Microelectron. Eng. · 2003 · 66 · 43810.1016/S0167-9317(02)00908-5 ↗
11. Lo · Proc. SPIE · 1997 · 3006 · 2610.1117/12.264243 ↗
12. Majidi · Proceedings of the Royal Society A: Mathematical Physical and Engineering Sciences · 2009 · 465 · 221710.1098/rspa.2009.0060 ↗
13. Pandija · Mater. Chem. Phys. · 2007 · 102 · 14410.1016/j.matchemphys.2006.11.015 ↗
14. Plößl · Mater. Sci. Eng. R · 1999 · 25 · 110.1016/S0927-796X(98)00017-5 ↗
15. Stengl · 1989 · 12310.1109/SOI.1989.69797 ↗
16. Tadepalli · Acta Mater. · 2008 · 56 · 43810.1016/j.actamat.2007.10.016 ↗
17. Takeuchi · 2021 · 57
18. Tong · J. Electrochem. Soc. · 1995 · 142 · 397510.1149/1.2048444 ↗
19. Turner · J. Appl. Phys. · 2002 · 92 · 765810.1063/1.1521792 ↗
20. Turner · Proc. Royal Soc. A · 2006 · 462 · 17110.1098/rspa.2005.1571 ↗
21. Turner · J. Appl. Phys. · 2004 · 95 · 34910.1063/1.1629776 ↗
22. Turner · IEEE Trans. Semicond. Manuf. · 2005 · 18 · 28910.1109/TSM.2005.845009 ↗