Laser-induced inverted patterning of nanocrystals embedded glass for micro-light-emitting diodes

High resolution and full-color light-emitting diodes require precise and efficient patterning of light-emitting structures containing quantum dots or nanocrystals. We report light-induced inverted patterning of nanocrystals in glasses for micro-light-emitting diodes. Ultrafast laser pulse induces structural destruction and amorphization of nanocrystals in glasses, forming inverted luminescent patterns. High-throughput patterning of micrometer-scale, thermally stable, and highly photoluminescent structures in nanocrystals embedded glass is realized. This patterning method provides a novel way to fabricate high-performance and ultrahigh-resolution color conversion layers for micrometer-scale light-emitting diodes.