Thick Tetrahedral Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc
Source abstract
Abstract
High-quality diamond-like carbon (DLC) films are renowned for their exceptional hardness, low friction coefficient, and superior chemical stability. These properties make DLC films exceptionally suitable for protective coatings in optical, mechanical, aerospace, and military applications. Thick DLC films with outstanding mechanical properties were deposited on DC53 die steel using a mixed energy carbon plasma generated by a filtered cathodic vacuum arc (FCVA) device. The structural, mechanical, tribological, and optical properties of the films were tested by Raman, surface morphology instrument, Vickers Indenter, tribometer, and UV-VIS spectrophotometry. The results indicated that 14 µm tetrahedral amorphous carbon (ta-C) films with a good combination with DC53 die steel substrate were obtained. The hardness was 9415 HV, which is close to that of diamond films. The fracture toughness was 4 MPa·m1/2. The friction coefficient was 0.0898, and the optical band gap was 3.12 eV.
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Tribology and Wear Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Institute of Radiation Technology, Beijing Academy of Science and Technology, Beijing 100875, China
Key Laboratory of Beam Technology of Ministry of Education, School of Physics and Astronomy, Beijing Normal University, Beijing 100875, China
Laboratory of Beam Technology and Energy Materials, Faculty of Arts and Sciences, Beijing Normal University, Zhuhai 519087, China
Funding
2025 Reform and Development Project and Innovation Engineering Project of BJAST · 2024 Reform and Development Project of BJAST
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