journal article·1984-03

Low pressure chemical vapour (BPOVD) of Al and AlSi alloy films

Authors not provided

Vacuum· Volume 34· Issue 3-4
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Abstract

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Research context

OpenAlex topics: GaN-based semiconductor devices and materials · Material Properties and Applications · Acoustic Wave Resonator Technologies

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References (2)

Show source-provided references
1. Malazgirt · Metallurgical Trans B · 1980 · 11B · 22510.1007/BF02668406 ↗
2. Ziegler · Angew Chem · 1955 · 67 · 424