journal article·1982-04

4883. Pumping of corrosive or hazardous gases with turbomolecular and oil-filled rotary vane backing pumps

Authors not provided

Vacuum· Volume 32· Issue 4
Publisher page

Abstract

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Research context

OpenAlex topics: Advanced Thermodynamic Systems and Engines · Refrigeration and Air Conditioning Technologies · Spacecraft and Cryogenic Technologies

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References

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