journal article·1991-01

7452. Heterogeneous Si3N4 growth during SiNx film deposition and thermal nitridation of Si(100): an X-ray photoemission spectroscopy study

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Vacuum· Volume 42· Issue 10-11
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Abstract

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Research context

OpenAlex topics: Semiconductor materials and devices · Electron and X-Ray Spectroscopy Techniques · GaN-based semiconductor devices and materials

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