Study on spectral characteristics of Ar~+ in the pulse-modulated magnetized capacitive coupling discharge

Employing parallel plate pulse-modulated capacitive coupling RF discharge device in this paper,we investigated the changing regularity about electron excitation temperature and relative intensity of Ar + optical emission spectrometry with air pressure,RF power,modulation frequency,duty cycle and magnetic field intensity using the method of optical emission spectrum diagnosis in the process of producing plasma in Ar discharge under the condition of different magnetic field intensity at low pressure(30Pa~65Pa).