Preparation of textured transparent conductive ZAO films

Textured transparent conductive ZAO thin films have good prospects in application to the silicon-based thin film solar cells.With the ZAO ceramic target used in DC magnetron sputtering process,the ZAO films were prepared,and they were etched by the liquids we made to obtain the required surface with textured structure.The dependence of film performance on temperature and thermal stability of films annealed on different conditions,and the resistance,transmittance and surface morphology of ZAO films etched for different time were investigated.The results showed that with the same vacuum degree,sputtering power and rhythm,the best ZAO films can be prepared at 220℃ with best textured structure obtained when the etching time is 30sec.