Calibration apparatus of comparison leak rate method
Source abstract
Abstract
The calibration apparatus of comparison leak rate method is a metrology standard apparatus for gas leak rate. The vacuum leak can be calibrated with the absolute comparison method and the relative comparison method. The absolute method is 10 4 ～10 9 Pa·m 3/s, and the comparative compound standard uncertainty is less than 10%. The relative comparison method is 10 6 ～ 10 10 Pa·m 3/s, and the comparative compound standard uncertainty is less than 25%.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Elevator Systems and Control · Experimental Learning in Engineering · Advanced Sensor and Control Systems
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