Decoupling of processes in coating systems by pumped buffers
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OpenAlex topics: Physics and Engineering Research Articles · Scientific Measurement and Uncertainty Evaluation · Advanced Sensor Technologies Research
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References (3)
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1. McMahon · J Vac Sci Technol · 1982 · 20 · 37610.1116/1.571470 ↗
2. Schultheiss · Solid State Technol · 1988 · 3 · 107
3. Kieser · 1980 · 201 · 376