A simple/universal rf-generator module system for use in plasma processing
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Abstract
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Research context
OpenAlex topics: Plasma Diagnostics and Applications · Electrohydrodynamics and Fluid Dynamics
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References (4)
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1. Norström · Vacuum · 1980 · 30 · 22310.1016/S0042-207X(80)80746-9 ↗
2. Eriksson · 1979
3. Siliconics
4. Philips · R F Power Transistors and Modules current catalogue · 1985