Numerical simulation of optical etch rate monitoring of VLSI circuits by personal computer
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Abstract
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Research context
OpenAlex topics: Optical Coatings and Gratings · Surface Roughness and Optical Measurements · Laser Material Processing Techniques
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References (5)
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1. Berning · 1963 · Vol. 1 · 69
2. Optics of Thin Films
3. Marcoux · Solid State Technol · 1981 · 24 · 11510.1016/0038-1101(81)90004-6 ↗
4. Heimann · 1983
5. Mise en oeuvre d'un interférométre laser informatisé pour la gravure sélective des ‘puces’ en analyse de contruction