Growth of polycrystalline SiC films on SiO 2 and Si 3 N 4 by APCVD
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OpenAlex topics: Thin-Film Transistor Technologies · Diamond and Carbon-based Materials Research · Copper Interconnects and Reliability
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References (8)
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2. Technical Digest - 12th IEEE International Conference on Micro Electro Mechanical Systems
3. DeAnna · J. Chem. Vapor Depos. 6 · 1999 · 280
4. Zorman · J. Appl. Phys. · 1995 · 78 · 513610.1063/1.359745 ↗
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8. J. Bloem, in: T.O. Sedgwick, H. Lydtin, (Eds.), Proceedings of the 7th International Conference on CVD, The Electrochemical Society Proceedings. Vol. 79-3, 1979, p. 41.