article·2010-02-20Open access

Solid on liquid deposition

Jérôme Charmet, O. Banakh, Edith Laux, Benjamin Graf, F. M. Dias, Alain Dunand, H. Keppner, Ganna Gorodyska, Marcus Textor, Wilfried Noell, Ν. F. de Rooij, A. Neels, M. Dadras, Alex Dommann, H. Knapp, Ch. Borter, M. Benkhaira

Abstract

A process for the deposition of a solid layer onto a liquid is presented. The polymer poly-di-chloro-para-xylylene, also known as Parylene C, was grown on low vapour pressure liquids using the conventional low pressure chemical vapour deposition process. A reactor was built and a process developed to enable the deposition of Parylene C at atmospheric pressure over high vapour pressure liquids. It was used to deposit Parylene C over water among others. In all cases Parylene C encapsulated the liquid without influencing its initial shape. The results presented here show also that the Parylene C properties are not affected by its growth on liquid templates and the roughness of the Parylene C surface in contact with the liquid during the deposition is extremely low.
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Research context

OpenAlex topics: Molecular Junctions and Nanostructures · Semiconductor materials and devices · Neuroscience and Neural Engineering

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