Synthesis and characterisation of MoS2 thin films by electron beam evaporation

Abstract Thin films of MoS2 were deposited on glass substrates by electron beam evaporation. The films were characterized by Field Emission Scanning Electron Microscope (FESEM), Energy Dispersive X-ray Spectroscopy (EDS), Raman, optical spectroscopy and X-ray Photoelectron Spectroscopy (XPS). FESEM and EDS showed the formation of MoS2 nano-particles of sizes around ~10 nm. Raman spectra showed the formation of 2-H MoS2 with trace amounts of Mo-oxides. Optical band-gap was calculated to be ~2.13 eV. XPS studies were performed to evaluate the different oxidation states of Mo and S present in the films. Surface oxidation and elemental composition as a function of depth was studied using Angle-Resolved X-ray Photoelectron Spectroscopy.