DataVXThin Solid FilmsPaper
article·2016-02-16

Reactive multi-pulse HiPIMS deposition of oxygen-deficient TiOx thin films

Vasile Tiron, Ioana–Laura Velicu, Marius Dobromir, Alexandra Demeter, Florentina Samoila, Cristian Ursu, Lucel Sirghi

Thin Solid Films
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Materials processing

OpenAlex topics: ZnO doping and properties · Metal and Thin Film Mechanics · Electronic and Structural Properties of Oxides

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