article·1993-03-01

Digital etching study and fabrication of fine Si lines and dots

Jiro Yamamoto, Takashi Kawasaki, Hiroyuki Sakaue, Shoso Shingubara, Yasuhiro Horiike

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OpenAlex topics: Semiconductor materials and devices · Silicon Nanostructures and Photoluminescence · Nanowire Synthesis and Applications

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