Transparent conducting properties of anatase Ti0.94Nb0.06O2 polycrystalline films on glass substrate

Abstract We report on transparent conducting properties of anatase Ti0.94Nb0.06O2 (TNO) polycrystalline films on glass substrate, and discuss the role of grain crystallinity and grain boundary on resistivity. Thin films of TNO were deposited using pulsed laser deposition at substrate temperature ranging from room temperature to 350 °C, with subsequent H2-annealing at 500 °C. Polycrystalline TNO films showed resistivity of 4.5 × 10− 4 Ω cm and 1.5 × 10− 3 Ω cm for films prepared at substrate temperature of room temperature and 250 °C, respectively. X-ray diffraction measurements and transmission electron microscopy reveal that grain crystallinity and grain boundary play key roles in conductive films.