The study of Pt Schottky contact on porous GaN for hydrogen sensing

Abstract This article reports the studies of Pt Schottky contact on porous n-type GaN for hydrogen sensing. A simpler and improved electroless etching method has been developed to generate porous GaN in which high uniformity of the porous area could be achieved. Hydrogen sensor was subsequently fabricated by depositing Pt Schottky contacts onto the porous GaN sample. For comparative study, a standard hydrogen sensor was also prepared by depositing Pt Schottky contacts on the as-grown sample. Hydrogen detection was carried out at room temperature and 100 °C. This Pt/porous GaN sensor exhibited a significant change of current upon exposure to 2% H2 in N2 gas as compared to the standard Pt/GaN sensor. Morphological studies by scanning electron microscopy revealed that Pt contact deposited on porous GaN having a very rough surface morphology with pores distributed all over the contact layer. Therefore, the increase of current could be attributed to the unique microstructure at porous Pt/porous GaN interface which allowed higher accumulation of hydrogen and eventually led to stronger effect of the H-induced dipole layer.