journal article·1990-01

Incorporation of OH radicals in anodic silicon oxide films studied by secondary-ion mass spectroscopy, X-ray photoelectron spectroscopy and ir analysis

I. Montero, L. Galán, E. de la Cal, J.M. Albella, J.C. Pivin

Thin Solid Films· Volume 193-194
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Abstract

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Research context

OpenAlex topics: Semiconductor materials and devices · Anodic Oxide Films and Nanostructures · Electron and X-Ray Spectroscopy Techniques

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References (16)

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