DataVXThin Solid FilmsPaper
article·2013-11-21Open access

Direct current magnetron sputtered ZrB2 thin films on 4H-SiC(0001) and Si(100)

Lina Tengdelius, Mattias Samuelsson, Jens Jensen, Jun Lu, Lars Hultman, Urban Forsberg, Erik Janzén, Hans Högberg

Thin Solid Films
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OpenAlex topics: Advanced ceramic materials synthesis · Boron and Carbon Nanomaterials Research · MXene and MAX Phase Materials

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