Structural study of amorphous In2O3 film by grazing incidence X-ray scattering (GIXS) with synchrotron radiation

Abstract Grazing incidence X-ray scattering (GIXS) using synchrotron radiation is a very useful method for structural analysis of amorphous films. We investigated the structure of amorphous In2O3 film utilizing GIXS at BL19B2 in SPring-8. Radial distribution function (RDF) was obtained from the measurement data. Structural models were constructed by molecular dynamics (MD) and reverse Monte-Carlo (RMC) simulations, and the calculated RDFs from the simulations were compared with that observed. It was found that the average oxygen coordination number around In ions was almost 6 and the average length 2.12 A, which was smaller by about 3% than that of 2.18 A in crystalline In2O3. It was concluded that the atomic arrangement of the amorphous In2O3 was characterized by the increase in the number and the boarder angle of distribution of corner-sharing In–O–In bond compared with crystalline In2O3.