Applications of TiO2 film for environmental purification deposited by controlled electron beam-excited plasma

Abstract Taking advantage of the remarkable features of controlled electron beam-excited plasma (EBEP), the composition and the thickness of TiO 2 film could be directly controlled by the EBEP accelerating voltage V A and discharge current I D , respectively. Experiments were conducted on the dissolving effect on NO x (NO, NO 2 ) gas using glass beads coated with a TiO 2 film deposited by EBEP. With a bead sample size of 20 g and an NO gas flow rate of 100 ml/min, the NO dissolvable amount was approximately 10 −4 mol/m 2 for 120 min. Using a glass plate, glass beads and zeolites coated with TiO 2 film, the experiments succeeded in dissolving water-soluble ink and in obtaining a hydrophilic effect.