Improvement in real time detection and selectivity of phthalocyanine gas sensors dedicated to oxidizing pollutants evaluation

A sensor microsystem prototype, using copper phthalocyanine thin film as sensitive layer, and dedicated to ozone evaluation, was developed. The methodology implemented is based on cyclic sensor recalibrations by thermal cleaning of the sensitive membrane, and on pollutant concentration quantification according to the kinetics of sensor response. Results of laboratory experiments for various NO2 and O3 concentrations, in the range of 10–200 ppb, illustrate the selectivity of CuPc sensors towards ozone, obtained by our methodology. We have shown that ozone selectivity is especially improved for short time of exposure (few minutes) and for phthalocyanine layer maintained at low temperature (80 °C). For optimal conditions, our microsystem exhibits a threshold lower than 10 ppb, a resolution lower than 10 ppb, and good reproducibility of measurements. Performances obtained in real urban atmosphere are satisfying to ensure real time evaluation of ozone during several days. Long-term stability and the detection of NO2 by associating chemical filters to our microsystem will be also discussed.