article·1995-05-01

Determination of the mechanical properties of r.f.-magnetron-sputtered zinc oxide thin films on substrates

Min-Yung Han, Jwo‐Huei Jou

Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: ZnO doping and properties · Metal and Thin Film Mechanics · Copper Interconnects and Reliability

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References

Reference metadata was not supplied for this record.