Preparation of TiO2/WO3 multilayer thin film by PLD method and its catalytic response to visible light

Abstract We report about multilayer TiO 2 /WO 3 thin films deposited on silicon and quartz glass substrate by pulsed laser deposition (PLD) method. The multilayer film has higher photocatalytic activity than TiO 2 film under visible light irradiation. The films were characterized using an atomic force microscope (AFM), X-ray diffraction method (XRD) and UV–VIS absorption spectrometry. Photocatalytic efficiency of TiO 2 and TiO 2 /WO 3 multilayer thin film was also evaluated by photodecomposition of methylene blue (MB) in aqueous solution. The portion of WO 3 layers in the multilayer film is very sensitive to photocatalytic property. The multilayer film containing 5% WO 3 layers in thickness showed the highest dye decomposition ratio.