A novel ozone detection at room temperature through UV-LED-assisted ZnO thick film sensors

Abstract In this work a novel ozone detection at room temperature (RT) has been investigated. Two functional materials, ZnO and (W 0.9 Sn 0.1 )O 3 − x (WS10) oxides, have been synthesized to prepare thick film gas sensors, both used in conventional heated mode as well as at RT assisted by UV irradiation. As a source of light, a light emitting diode (LED) of 400 nm peak wavelength was used. Under typical operating conditions of the UV-LED, the radiation flux density ϕ over the sensor was of about 5 · 10 17 photons/cm 2 . Powders and films have been characterized by means of TG-DTA, SEM, TEM and XRD. Finally, electrical measurements have been performed on sensing films with the aim to compare conductive properties, surface barrier heights and ozone sensing features with and without UV irradiation. Despite the fact that two types of conventional heated sensors offered quite similar results with respect to ozone sensing, it turned out that, at RT and with the assistance of UV light, ZnO behaved excellently fast detecting ozone at concentrations down to 10 ppb, while for WS10 under the same operating conditions an opposite result was observed, i.e. very low response and long response time.